公开(公告)号：WO2008006110A3

公开(公告)日：2008-01-10

申请号：PCT/US2007/073071

申请日：2007-07-09

Applicant: SRI INTERNATIONAL ,  HOLLAND, Christopher, E. ,  SCHWOEBEL, Paul, R. ,  SPINDT, Charles A. ,  PEARSON, Eric M. ,  AGUERO, Victor M. ,  BELLEW, Colby Lenn ,  STORMENT, Christopher Wayne

Inventor： HOLLAND, Christopher, E. ,  SCHWOEBEL, Paul, R. ,  SPINDT, Charles A. ,  PEARSON, Eric M. ,  AGUERO, Victor M. ,  BELLEW, Colby Lenn ,  STORMENT, Christopher Wayne

IPC: H01L29/06 ,  H01L29/12

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to provide the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

公开(公告)号：WO2008006110A2

公开(公告)日：2008-01-10

申请号：PCT/US2007073071

申请日：2007-07-09

Applicant: STANFORD RES INST INT ,  HOLLAND CHRISTOPHER E ,  SCHWOEBEL PAUL R ,  SPINDT CHARLES A ,  PEARSON ERIC M ,  AGUERO VICTOR M ,  BELLEW COLBY LENN ,  STORMENT CHRISTOPHER WAYNE

Inventor： HOLLAND CHRISTOPHER E ,  SCHWOEBEL PAUL R ,  SPINDT CHARLES A ,  PEARSON ERIC M ,  AGUERO VICTOR M ,  BELLEW COLBY LENN ,  STORMENT CHRISTOPHER WAYNE

IPC: H01L31/04

CPC classification number: H01J3/04 ,  H01J3/021 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/31749

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to provide the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract translation: 描述了一种微型制造的带电粒子发射器件，其包括衬底和形成在衬底中的多个带电粒子发射部位。 路径在每个发射位点和液态金属源之间延伸。 每个路径涂有非氧化金属的润湿层，用于润湿液态金属。 可用于提供润湿层的示例性非氧化性金属包括金和铂。 润湿层足够薄，使得尽管液态金属和润湿层的非氧化性金属之间存在任何化学相互作用，但是一些液态金属能够流到每个发射位置。