PLANAR MICROELECTROMECHANICAL DEVICE HAVING A STOPPER STRUCTURE FOR OUT-OF-PLANE MOVEMENTS
    1.
    发明申请
    PLANAR MICROELECTROMECHANICAL DEVICE HAVING A STOPPER STRUCTURE FOR OUT-OF-PLANE MOVEMENTS 审中-公开
    具有非平面运动停止结构的平面微电子设备

    公开(公告)号:WO2008012846A8

    公开(公告)日:2009-01-08

    申请号:PCT/IT2006000576

    申请日:2006-07-26

    Abstract: Described herein is a microelectromechanical device (10) having a mobile mass (12) that undergoes a movement, in particular a spurious movement, in a first direction (z) in response to an external event; the device moreover has a stopper structure (14, 20) configured so as to stop said spurious movement. In particular, a stopper element (20) is fixedly coupled to the mobile mass (12) and is configured so as to abut against a stopper mass (14) in response to the spurious movement, thereby stopping it. In detail, the stopper element (20) is arranged on the opposite side of the stopper mass (14) with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass (12) and extends in the space occupied by the stopper mass, in the first direction (z).

    Abstract translation: 这里描述的是具有响应于外部事件在第一方向(z)上经历移动,特别是杂散运动的移动质量块(12)的微机电装置(10)。 该装置还具有构造成停止所述杂散运动的止动结构(14,20)。 特别地,止动元件(20)固定地联接到移动质量块(12),并且被配置为响应于伪运动而抵靠止动块(14),从而停止它。 详细地说,止动元件(20)相对于杂散运动的方向设置在止动块(14)的相对侧上,从可移动质量块(12)所占据的空间突出,并在占据的空间 通过止动块在第一方向(z)上。

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