Abstract:
Described herein is a microelectromechanical device (10) having a mobile mass (12) that undergoes a movement, in particular a spurious movement, in a first direction (z) in response to an external event; the device moreover has a stopper structure (14, 20) configured so as to stop said spurious movement. In particular, a stopper element (20) is fixedly coupled to the mobile mass (12) and is configured so as to abut against a stopper mass (14) in response to the spurious movement, thereby stopping it. In detail, the stopper element (20) is arranged on the opposite side of the stopper mass (14) with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass (12) and extends in the space occupied by the stopper mass, in the first direction (z).
Abstract:
A microelectromechanical device has a mobile mass that undergoes a movement, in particular a spurious movement, in a first direction in response to an external event; the device moreover has a stopper structure configured so as to stop said spurious movement. In particular, a stopper element is fixedly coupled to the mobile mass and is configured so as to abut against a stopper mass in response to the spurious movement, thereby stopping it. In detail, the stopper element is arranged on the opposite side of the stopper mass with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass and extends in the space occupied by the stopper mass, in the first direction.