公开(公告)号：KR1020070093845A

公开(公告)日：2007-09-19

申请号：KR1020070024367

申请日：2007-03-13

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가지와라히로노부 ,  사까이미쯔히로 ,  가끼노아끼라

IPC: B65G49/06 ,  H01L21/68 ,  H01L21/67

Abstract: A substrate buffer device, a method of buffering a substrate, a substrate processing apparatus, and a computer readable storage medium are provided to prevent the dispersion of particles and to improve a throughput. A substrate buffer device includes a shelf portion(5), an elevator, a controller, a conveyor, and a detector(105). The shelf portion is moved to a conveying line. The shelf portion includes plural loading frames for loading a substrate to the conveying line. The elevator elevates the shelf portion to move one of the plural loading frames to the conveying line. The controller controls an elevation of the shelf portion by the elevator based on a detection signal of the detector. The conveyor conveys the substrate along a conveying direction when the plural loading frames are moved to the conveying line. The detector is provided at an upstream of the conveying direction to be spaced apart from the loading frames, and detects the substrate conveyed to the conveying line.

Abstract translation: 提供衬底缓冲装置，缓冲衬底的方法，衬底处理装置和计算机可读存储介质，以防止颗粒的分散并提高生产量。 衬底缓冲装置包括搁架部分（5），电梯，控制器，传送器和检测器（105）。 搁板部分移动到输送线。 搁架部分包括用于将基板装载到输送线的多个装载框架。 电梯提升架子部分，使多个装载框架中的一个移动到传送线。 控制器基于检测器的检测信号控制电梯的货架部分的高度。 当多个装载架移动到输送线时，输送机沿输送方向输送基板。 检测器设置在输送方向的上游，与装载框架间隔开，并且检测输送到输送线的基板。

公开(公告)号：KR101268261B1

公开(公告)日：2013-05-31

申请号：KR1020070024367

申请日：2007-03-13

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가지와라히로노부 ,  사까이미쯔히로 ,  가끼노아끼라

IPC: B65G49/06 ,  H01L21/68 ,  H01L21/67

Abstract: 기판버퍼장치(36)는반송라인(A)에진출가능하고, 또한반송라인(A)을반송된기판(G)을적재가능한적재대(5a 내지 5f)를상하로복수단갖는선반부(5)와, 선반부(5)를승강시켜적재대(5a 내지 5f) 중어느하나를반송라인(A)에진출시키는승강기구(6)를구비하고, 각적재대(5a 내지 5f)는반송라인(A)에진출하였을때에, 기판(G)을반송방향을따라반송하는컨베이어기구(50a 내지 50f)를갖고반송라인(A)의일부로서기능하고, 반송라인(A)에진출하고있는적재대(5a)에반송라인(A)을반송되어온 기판(G)을적재하고, 승강기구(6)에의해선반부(5)가승강되어기판(G)을적재대(5a)와함께반송라인(A)으로부터퇴피시킨다.