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公开(公告)号：KR102166224B1
公开(公告)日：2020-10-15
申请号：KR1020170091513
申请日：2017-07-19
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/3065 , H01L21/324 , H01L21/3213 , H01L21/67 , H01L21/677
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