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公开(公告)号:KR1020110119528A
公开(公告)日:2011-11-02
申请号:KR1020110022023
申请日:2011-03-11
Applicant: 도쿄엘렉트론가부시키가이샤
Abstract: PURPOSE: An apparatus for coating a resist, a coating developing system including the same, and a method for coating the resist are provided to form a color resist film with high film thickness uniformity on a substrate. CONSTITUTION: An apparatus for coating a resist(50) includes a substrate temperature adjusting part, a color resist liquid supplying part, and a substrate rotating part. The substrate temperature adjusting part adjusts the temperature of a substrate in order to increase a temperature at the peripheral part of the substrate. The color resist liquid supplying part supplies color resist liquid to the substrate. The substrate rotating part rotates the substrate on which the color resist liquid is supplied.
Abstract translation: 目的:提供一种涂布抗蚀剂的装置,包括该涂料的涂料显影系统和涂覆该抗蚀剂的方法,以在基材上形成具有高膜厚均匀性的抗蚀剂膜。 构成:用于涂覆抗蚀剂(50)的设备包括基板温度调节部分,抗彩色液体供应部分和基板旋转部分。 衬底温度调节部分调节衬底的温度以增加衬底的周边部分的温度。 彩色抗蚀剂液体供应部分向基片供应彩色抗蚀剂液体。 基板旋转部旋转供给着抗蚀剂液体的基板。
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公开(公告)号:KR101586872B1
公开(公告)日:2016-01-19
申请号:KR1020110022023
申请日:2011-03-11
Applicant: 도쿄엘렉트론가부시키가이샤
Abstract: 본발명은높은막두께균일성을갖는컬러레지스트막을기판상에형성하는것이가능한레지스트도포장치및 레지스트막형성방법을제공한다. 본발명의실시형태에의한레지스트도포장치는, 기판의중앙부에서의온도보다기판의주변부에서의온도가높아지도록기판의온도를조정하도록구성된기판온도조정부와, 중앙부보다주변부에서온도가높아지도록기판온도조정부에의해온도조정된기판상에컬러레지스트액을공급하는컬러레지스트액공급부와, 컬러레지스트액이공급된기판을회전시키는기판회전부를포함한다.
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