레지스트 도포 장치, 이를 구비한 도포 현상 시스템, 및 레지스트 도포 방법
    1.
    发明公开
    레지스트 도포 장치, 이를 구비한 도포 현상 시스템, 및 레지스트 도포 방법 有权
    耐腐涂层设备,具有相同涂层的涂料开发系统

    公开(公告)号:KR1020110119528A

    公开(公告)日:2011-11-02

    申请号:KR1020110022023

    申请日:2011-03-11

    Abstract: PURPOSE: An apparatus for coating a resist, a coating developing system including the same, and a method for coating the resist are provided to form a color resist film with high film thickness uniformity on a substrate. CONSTITUTION: An apparatus for coating a resist(50) includes a substrate temperature adjusting part, a color resist liquid supplying part, and a substrate rotating part. The substrate temperature adjusting part adjusts the temperature of a substrate in order to increase a temperature at the peripheral part of the substrate. The color resist liquid supplying part supplies color resist liquid to the substrate. The substrate rotating part rotates the substrate on which the color resist liquid is supplied.

    Abstract translation: 目的:提供一种涂布抗蚀剂的装置,包括该涂料的涂料显影系统和涂覆该抗蚀剂的方法,以在基材上形成具有高膜厚均匀性的抗蚀剂膜。 构成:用于涂覆抗蚀剂(50)的设备包括基板温度调节部分,抗彩色液体供应部分和基板旋转部分。 衬底温度调节部分调节衬底的温度以增加衬底的周边部分的温度。 彩色抗蚀剂液体供应部分向基片供应彩色抗蚀剂液体。 基板旋转部旋转供给着抗蚀剂液体的基板。

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