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公开(公告)号：KR102118784B1
公开(公告)日：2020-06-03
申请号：KR1020180027609
申请日：2018-03-08
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/3065 , H01L21/311 , H01L21/3213 , H01L21/768 , H01L21/324 , H01L21/02 , H01L29/78 , H01L29/66
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