公开(公告)号：KR100928596B1

公开(公告)日：2009-11-26

申请号：KR1020067020302

申请日：2003-11-10

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가사이시게루 ,  이시바시세이지 ,  야마모토가오루 ,  다나카스미 ,  야나기타니게니치

IPC: H01L21/02

CPC classification number: G05D16/208

Abstract: A fluid treatment apparatus and a fluid treatment method, the apparatus comprising a treatment container (4) having a loading table (8) for loading a treated body (W) thereon, a gas introducing means (10) introducing treatment gas into the treatment container, treatment gas feed systems (14, 16, 18) feeding specified treatment gases, an inert gas feed system (12) feeding inert gas, a vacuum exhaust system (32) in which a pressure regulating valve (36) allowing a valve opening to be varied and a vacuum pump (38) are installed, and a pressure gauge (48), wherein when a treatment in which the partial pressure of the treatment gas is important is performed, the valve opening of the pressure regulating valve (36) is controlled based on the detected values on the pressure gauge (48) while the treatment gas flows at a specified rate and when a treatment in which the partial pressure of the treatment gas is not so important, the valve opening of the pressure regulating valve (36) is fixed to a specified value and, based on the detected values on the pressure gauge (48), the supplied amount of the inert gas is controlled, whereby even when a plurality of types of the treatments in which the ranges of treatment pressures are largely different from each other are performed, the pressure controls of the treatments can be properly performed.

Abstract translation: 一种流体处理装置和流体处理方法，所述装置包括：处理容器（4），其具有用于在其上装载处理过的物体（W）的装载台（8）;气体引入装置（10），将处理气体引入处理容器 ，供给特定处理气体的处理气体供给系统（14,16,18），供给惰性气体的惰性气体供给系统（12），真空排气系统（32），其中压力调节阀（36）允许阀门开启 （38）和压力计（48），其中当处理气体的分压是重要的处理时，压力调节阀（36）的阀门开度为 基于压力计（48）上的检测值进行控制，同时处理气体以特定的速率流动，并且当处理气体的分压不那么重要的处理时，压力调节阀（36 ）被固定为a 根据压力计（48）的检测值来控制惰性气体的供给量，即使在处理压力的范围大幅不同的多种处理 被执行时，治疗的压力控制可以被适当地执行。

公开(公告)号：KR1020060116248A

公开(公告)日：2006-11-14

申请号：KR1020067020302

申请日：2003-11-10

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가사이시게루 ,  이시바시세이지 ,  야마모토가오루 ,  다나카스미 ,  야나기타니게니치

IPC: H01L21/02

CPC classification number: G05D16/208

Abstract: A fluid treatment apparatus and a fluid treatment method, the apparatus comprising a treatment container (4) having a loading table (8) for loading a treated body (W) thereon, a gas introducing means (10) introducing treatment gas into the treatment container, treatment gas feed systems (14, 16, 18) feeding specified treatment gases, an inert gas feed system (12) feeding inert gas, a vacuum exhaust system (32) in which a pressure regulating valve (36) allowing a valve opening to be varied and a vacuum pump (38) are installed, and a pressure gauge (48), wherein when a treatment in which the partial pressure of the treatment gas is important is performed, the valve opening of the pressure regulating valve (36) is controlled based on the detected values on the pressure gauge (48) while the treatment gas flows at a specified rate and when a treatment in which the partial pressure of the treatment gas is not so important, the valve opening of the pressure regulating valve (36) is fixed to a specified value and, based on the detected values on the pressure gauge (48), the supplied amount of the inert gas is controlled, whereby even when a plurality of types of the treatments in which the ranges of treatment pressures are largely different from each other are performed, the pressure controls of the treatments can be properly performed.

Abstract translation: 一种流体处理装置和流体处理方法，该装置包括：处理容器（4），具有用于装载处理体（W）的装载台（8）;气体导入装置（10），将处理气体导入处理容器 ，供给特定处理气体的处理气体供给系统（14,16,18），供给惰性气体的惰性气体供给系统（12），真空排气系统（32），其中压力调节阀（36）允许阀打开 改变并安装真空泵38和压力计48，其中当处理气体的分压重要的处理被执行时，压力调节阀36的阀开度为 当处理气体以规定的速度流动时，基于压力计（48）上的检测值进行控制，并且当处理气体的分压不那么重要的处理时，压力调节阀（36）的开阀 ）被固定为a 规定值，并且基于压力计（48）上的检测值，控制惰性气体的供给量，由此即使处理压力范围大大不同的多种处理方式 可以适当地进行处理的压力控制。

公开(公告)号：KR100715052B1

公开(公告)日：2007-05-07

申请号：KR1020057007348

申请日：2003-11-10

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가사이시게루 ,  이시바시세이지 ,  야마모토가오루 ,  다나카스미 ,  야나기타니게니치

IPC: H01L21/02

CPC classification number: G05D16/208

Abstract: 이 처리 장치는 기판(W)을 탑재하는 탑재대(8)를 갖는 처리용기(4)와, 처리 가스를 도입하는 가스 도입 수단(10)과, 소정의 처리 가스를 공급하는 처리 가스 공급계(14, 16, 18)와, 불활성 가스를 공급하는 불활성 가스 공급계(12)와, 밸브 개방도가 가능하게 이루어진 압력 제어 밸브(36)와 진공 펌프(38)가 설치된 진공 배기계(32)와, 압력계(48)를 갖고, 처리 가스의 분압이 중요해지는 처리를 할 때에는 처리 가스를 일정량 흐르게 하면서 압력계(48)의 검출값에 근거하여 압력 제어 밸브(36)의 밸브 개방도를 제어하고, 처리 가스의 분압이 비교적 중요해지지 않는 처리를 할 때에는 압력 제어 밸브(36)의 밸브 개방도를 소정의 값으로 고정함과 동시에 압력계(48)의 검출값에 근거하여 불활성 가스의 공급량을 제어한다. 따라서, 처리 압력의 범위가 크게 다른 복수 종류의 처리를 하는 경우에도, 각각의 처리의 압력 제어를 적정하게 실행할 수 있다.

公开(公告)号：KR1020050074506A

公开(公告)日：2005-07-18

申请号：KR1020057007348

申请日：2003-11-10

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가사이시게루 ,  이시바시세이지 ,  야마모토가오루 ,  다나카스미 ,  야나기타니게니치

IPC: H01L21/02

CPC classification number: G05D16/208

Abstract: A fluid treatment apparatus and a fluid treatment method, the apparatus comprising a treatment container (4) having a loading table (8) for loading a treated body (W) thereon, a gas introducing means (10) introducing treatment gas into the treatment container, treatment gas feed systems (14, 16, 18) feeding specified treatment gases, an inert gas feed system (12) feeding inert gas, a vacuum exhaust system (32) in which a pressure regulating valve (36) allowing a valve opening to be varied and a vacuum pump (38) are installed, and a pressure gauge (48), wherein when a treatment in which the partial pressure of the treatment gas is important is performed, the valve opening of the pressure regulating valve (36) is controlled based on the detected values on the pressure gauge (48) while the treatment gas flows at a specified rate and when a treatment in which the partial pressure of the treatment gas is not so important, the valve opening of the pressure regulating valve (36) is fixed to a specified value and, based on the detected values on the pressure gauge (48), the supplied amount of the inert gas is controlled, whereby even when a plurality of types of the treatments in which the ranges of treatment pressures are largely different from each other are performed, the pressure controls of the treatments can be properly performed.

Abstract translation: 一种流体处理装置和流体处理方法，该装置包括：处理容器（4），具有用于装载处理体（W）的装载台（8）;气体导入装置（10），将处理气体导入处理容器 ，供给特定处理气体的处理气体供给系统（14,16,18），供给惰性气体的惰性气体供给系统（12），真空排气系统（32），其中压力调节阀（36）允许阀打开 改变并安装真空泵38和压力计48，其中当处理气体的分压重要的处理被执行时，压力调节阀36的阀开度为 当处理气体以规定的速度流动时，基于压力计（48）上的检测值进行控制，并且当处理气体的分压不那么重要的处理时，压力调节阀（36）的开阀 ）被固定为a 规定值，并且基于压力计（48）上的检测值，控制惰性气体的供给量，由此即使处理压力范围大大不同的多种处理方式 可以适当地进行处理的压力控制。