公开(公告)号：KR1020110138180A

公开(公告)日：2011-12-26

申请号：KR1020110058782

申请日：2011-06-17

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 이찌노가쯔노리 ,  요시하라겐따로오 ,  요시하라고오스께

IPC: H01L21/027

CPC classification number: B05D1/005 ,  B05D3/104 ,  G03F7/162 ,  H01L21/6715 ,  H01L21/67178 ,  H01L21/0274

Abstract: PURPOSE: A coating method and a coating device are provided to adjust the surface tension of pre-wet liquid which is supplied to a substrate before coating liquid, thereby enhancing the coating feature of coating liquid. CONSTITUTION: A first supply pipe(147A) is connected to a first resist nozzle(143A) wherein the first supply pipe is connected to a first resist liquid supply source(146A). A second supply pipe(147B) is connected to a second resist nozzle(143B) wherein the second supply pipe is connected to a second resist liquid supply source(146B). Valves(148A,148B) are installed in the first and second supply pipes respectively. A first pre-wet nozzle(150A) and a second pre-wet nozzle(150B) are placed in a second arm. A supply controller(156) controls the state of supplying pre-wet liquid from the first and second pre-wet nozzles.

Abstract translation: 目的：提供涂布方法和涂布装置，以调节在涂布液体之前供给到基材的预湿液体的表面张力，从而增强涂布液的涂布特性。 构成：第一供应管（147A）连接到第一抗蚀剂喷嘴（143A），其中第一供应管连接到第一抗蚀剂液体供应源（146A）。 第二供给管（147B）连接到第二抗蚀剂喷嘴（143B），其中第二供应管连接到第二抗蚀剂液体供应源（146B）。 阀（148A，148B）分别安装在第一和第二供给管中。 将第一预湿喷嘴（150A）和第二预湿喷嘴（150B）放置在第二臂中。 供应控制器（156）控制从第一和第二预湿喷嘴供应预湿液体的状态。