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公开(公告)号：KR102017944B1
公开(公告)日：2019-09-03
申请号：KR1020170123274
申请日：2017-09-25
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/285 , H01L21/324 , H01L21/768
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