公开(公告)号：KR1020030043740A

公开(公告)日：2003-06-02

申请号：KR1020020074116

申请日：2002-11-26

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 키타노타카히로 ,  코가노리히사 ,  타케이토시치카 ,  카와푸치요시유키

IPC: H01L21/30

CPC classification number: H01L21/6715 ,  B05B13/041 ,  B05C5/0208 ,  B05C11/1013

Abstract: PURPOSE: A coating forming apparatus is provided to stabilize the discharge of a coating liquid and form a coating having high thickness uniformity when the coating liquid is supplied to a substrate while a nozzle unit moves in the X-direction and the coating is formed on the substrate. CONSTITUTION: The substrate is horizontally held by a substrate holding portion freely movable in the Y-direction, and a nozzle portion(5) is provided above and opposing the substrate, and movable in the X-direction corresponding to a coating liquid feeding region of the substrate. A discharge opening(54) is formed at a lower end of the nozzle portion, and a channel connecting the discharge opening with a coating liquid feed tube coupled to an upper end of the nozzle portion is formed within the discharge opening. At the midstream of the channel, a liquid pool portion larger in diameter than the discharge opening is formed, the inside of which is provided with a filtering member formed by porous bodies blocking the channel. The filtering member forms a pressure loss portion, which absorbs pulsation occurring at the coating liquid feed tube before it reaches the discharge opening.

Abstract translation: 目的：提供一种涂料形成装置，用于在喷嘴单元沿X方向移动并且涂层形成在涂覆液体上时将涂布液供给到基材时，使涂布液的排出稳定并形成具有高厚度均匀性的涂层 基质。 构成：由Y方向可自由移动的基板保持部水平地保持基板，在基板的上方并且与基板相对设置有喷嘴部（5），并且能够沿与X方向相对的涂布液供给区域的X方向移动 底物。 排出口（54）形成在喷嘴部分的下端，并且在排出口内形成有连接排出口与连接到喷嘴部的上端的涂液供给管的通道。 在通道的中部，形成直径大于排出口的液体池部分，其内部设置有由堵塞通道的多孔体形成的过滤构件。 过滤构件形成压力损失部分，其在到达排出口之前吸收在涂液供给管处发生的脉动。