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公开(公告)号：KR1020070101228A
公开(公告)日：2007-10-16
申请号：KR1020077007996
申请日：2005-08-10
Applicant: 도쿄엘렉트론가부시키가이샤
CPC classification number: H01J37/3222 , H01J37/32192
Abstract: A SWP source includes an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of the EM wave launcher adjacent the plasma. A power coupling system is coupled to the EM wave launcher and configured to provide the EM energy to the EM wave launcher for forming the plasma. A cover plate coupled to the plasma surface of the EM wave launcher protects the EM wave launcher from the plasma.
Abstract translation: SWP源包括电磁（EM）波发射器，其被配置为通过在等离子体附近的EM波发射器的等离子体表面上产生表面波来将期望的EM波模式中的EM能量耦合到等离子体。 功率耦合系统耦合到EM波发射器并且被配置为向用于形成等离子体的EM波发射器提供EM能量。 耦合到EM波发射器的等离子体表面的盖板保护EM波发射器免受等离子体的影响。
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公开(公告)号：KR101098141B1
公开(公告)日：2011-12-26
申请号：KR1020077007996
申请日：2005-08-10
Applicant: 도쿄엘렉트론가부시키가이샤
CPC classification number: H01J37/3222 , H01J37/32192
Abstract: 본발명의표면파플라즈마(SWP) 소스는플라즈마에인접한전자기파방사부(launcher)의플라즈마표면에표면파를발생시킴으로써소정의전자기파모드의전자기에너지를플라즈마에결합하도록구성된전자기(EM)파방사부를구비한다. 파워결합시스템이상기전자기파방사부에결합되고, 상기전자기에너지를상기전자기파방사부에공급하여상기플라즈마를형성하도록구성된다. 상기전자기파방사부의상기플라즈마표면에결합된커버플레이트가상기전자기파방사부를상기플라즈마로부터보호한다.
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