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公开(公告)号：KR102264002B1
公开(公告)日：2021-06-11
申请号：KR1020180123962
申请日：2018-10-17
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/67 , H01L21/306 , H01L21/311 , H01L21/3213
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