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公开(公告)号：KR101152578B1
公开(公告)日：2012-06-01
申请号：KR1020100010837
申请日：2010-02-05
Applicant: 삼성모바일디스플레이주식회사
Abstract: 본발명은챔버내에서제 1기판에대한기판이송및 얼라인공정수행과동시에제 2기판에대한증착공정을수행할수 있도록함으로써, 기판이송및 얼라인공정시소모되는유기물질재료의손실을줄여재료효율을극대화하고, 공정 Tack time을최소화할 수있는유기물증착장치및 증착방법을제공한다. 본발명의실시예에의한유기물증착장치는, 내부가제 1기판증착영역및 제 2기판증착영역으로구분되는챔버와; 상기제 1 또는제 2기판증착영역내에서제 1방향으로이동하여제 1기판또는제 2기판상으로유기물입자를분사시키는유기물증착원과; 상기유기물증착원이각각제 1 또는제 2기판증착영역에위치되도록상기유기물증착원을제 2방향으로회전이동시키는제 2이동수단이포함되어구성된다.
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公开(公告)号：KR1020100120081A
公开(公告)日：2010-11-12
申请号：KR1020100010837
申请日：2010-02-05
Applicant: 삼성모바일디스플레이주식회사
Abstract: PURPOSE: An organic material deposition apparatus and method are provided to simultaneously perform a substrate transfer and alignment process for a first substrate and a deposition process for a second substrate within the same processing chamber. CONSTITUTION: An organic material deposition apparatus comprises a chamber(100), an organic material deposition source(300), a first transfer unit(510), and a second transfer unit(520). The inside of the chamber is divided into a first substrate deposition region and a second substrate deposition region. The organic material deposition source moves in the first or second substrate deposition region and sprays organic particles on a first or second substrate. The first transfer unit rotates the organic material deposition source in a first direction to be located in the first or second substrate deposition region. The second transfer unit reciprocates the organic material deposition source in a second direction within the first or second substrate deposition region.
Abstract translation: 目的：提供一种有机材料沉积装置和方法，以在同一处理室内同时对第一基板进行基板转移和取向处理以及第二基板的沉积工艺。 构成：有机材料沉积装置包括室（100），有机材料沉积源（300），第一转移单元（510）和第二转移单元（520）。 室的内部被分为第一衬底沉积区域和第二衬底沉积区域。 有机材料沉积源在第一或第二衬底沉积区域中移动并在第一或第二衬底上喷射有机颗粒。 第一传送单元使第一方向上的有机材料沉积源旋转以位于第一或第二基板沉积区域中。 第二传送单元使第一或第二基板沉积区域内的有机材料沉积源沿第二方向往复运动。
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