公开(公告)号：KR1020110061287A

公开(公告)日：2011-06-09

申请号：KR1020090117891

申请日：2009-12-01

Applicant: 삼성모바일디스플레이주식회사

Inventor： 신의신 ,  남명우 ,  박진한 ,  박재석

IPC: H01L21/027 ,  H01L21/20 ,  H01L21/66

CPC classification number: G01N21/94 ,  G01N21/8901 ,  G01N21/9501 ,  G03F7/162 ,  G03F7/7065

Abstract: PURPOSE: A surface inspecting device for sensing foreign materials on the surface of an object, a method for inspecting a surface using the same, and a slit coater including the same are provided to prevent a slit nozzle from becoming damaged or broken due to foreign materials by inspecting foreign materials on the surface of a substrate in real time. CONSTITUTION: A slit lighting unit(10) emits slit light. An optical system(20) divides the slit light into two light and emits the divided light to an object(5). The optical system includes a first splitter(21), a second splitter(22), a reflection mirror(23), and a PZT(Piezo-electronic Transducer) unit(24). An image device(30) photographs interference phase and outputs an image signal. An analyzing unit(40) determines whether to sense foreign materials by analyzing the brightness of the image signal in real time.

Abstract translation: 目的：提供用于感测物体表面的异物的表面检查装置，使用其的表面检查方法和包括该表面的切缝式涂布机，以防止狭缝喷嘴由于异物而损坏或破裂 通过实时检查基板表面的异物。 构成：狭缝照明单元（10）发射狭缝光。 光学系统（20）将狭缝光分成两个光，并将分光发射到物体（5）。 光学系统包括第一分离器（21），第二分离器（22），反射镜（23）和PZT（压电电子传感器）单元（24）。 图像装置（30）拍摄干涉相位并输出图像信号。 分析单元（40）通过实时分析图像信号的亮度来确定是否感测异物。