公开(公告)号：KR101135535B1

公开(公告)日：2012-04-17

申请号：KR1020100058150

申请日：2010-06-18

Applicant: 삼성모바일디스플레이주식회사

Inventor： 권오섭 ,  이상조 ,  이홍로 ,  류제길

IPC: H01L21/324

Abstract: 본 발명은 레이저를 이용한 실리콘 결정화 시스템 및 실리콘 결정화 방법에 관한 것이다. 본 발명의 일 실시예에 따른 실리콘 결정화 시스템은 라인 모양의 레이저 빔의 장축 방향을 따라 상기 레이저 빔을 진동시키기 위한 진동 장치를 포함하며, 상기 레이저 빔이 진동하는 진동 주파수는 주기적으로 생성되며 랜덤하게 변한다.

公开(公告)号：KR1020110032359A

公开(公告)日：2011-03-30

申请号：KR1020090089801

申请日：2009-09-22

Applicant: 삼성모바일디스플레이주식회사

Inventor： 이상조 ,  박경호

IPC: H01L21/324 ,  H01L21/02

CPC classification number: C30B1/023 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02675 ,  H01L31/1872 ,  Y02E10/50 ,  Y02P70/521

Abstract: PURPOSE: A laser crystallization apparatus is provided to stably crystallize amorphous silicon by preventing a stain on the surface of a silicon layer. CONSTITUTION: In a laser crystallization apparatus, a partition wall(14) compartmentalizes the inside of a box body into a first work room and a second work room. The partition wall has a pass hole connecting the first work room and the second work room. A gas inflow port(15) is formed on one side of the first work room. A plurality of flow control panels are formed on the second work room and are adjacent to the partition wall. Nitrogen gas is flowed into the first work room through the gas inflow port.

Abstract translation: 目的：提供一种激光结晶装置，通过防止硅层表面的污点来稳定地结晶非晶硅。 构成：在激光结晶装置中，分隔壁（14）将盒体的内部分隔成第一工作室和第二工作室。 分隔壁具有连接第一工作室和第二工作室的通孔。 气体流入口（15）形成在第一工作室的一侧。 多个流量控制面板形成在第二工作室上并与分隔壁相邻。 氮气通过气体流入口流入第一工作室。

公开(公告)号：KR1020110046239A

公开(公告)日：2011-05-04

申请号：KR1020100058150

申请日：2010-06-18

Applicant: 삼성모바일디스플레이주식회사

Inventor： 권오섭 ,  이상조 ,  이홍로 ,  류제길

IPC: H01L21/324

CPC classification number: H01L21/02675 ,  B23K26/0622 ,  B23K26/082 ,  H01L21/02532 ,  H01L21/268

Abstract: PURPOSE: A silicon crystallizing system and silicon crystallizing method using laser are provided to reduce energy irregularity along with a long axis direction of a laser beam, thereby increasing the display quality of a display device. CONSTITUTION: An optical system(13) comprises a plurality of mirrors. The optical system scans an oscillated laser beam onto a substrate(14) by changing the energy distribution and direction of a laser beam. A vibration frequency controller(54) controls a vibration frequency to vibrate at least one mirror of the optical system. The vibration frequency controller includes a vibration frequency generator(54a) and a lookup table(54b) storing a vibration frequency. A data storage system(53) stores a vibration frequency generate by the vibration frequency generator.

Abstract translation: 目的：提供使用激光的硅结晶系统和硅结晶方法以减少与激光束的长轴方向的能量不均匀性，从而增加显示装置的显示质量。 构成：光学系统（13）包括多个反射镜。 光学系统通过改变激光束的能量分布和方向将振荡的激光束扫描到衬底（14）上。 振动频率控制器（54）控制振动频率以振动光学系统的至少一个反射镜。 振动频率控制器包括振动频率发生器（54a）和存储振动频率的查找表（54b）。 数据存储系统（53）存储由振动频率发生器产生的振动频率。