公开(公告)号：KR1020100120975A

公开(公告)日：2010-11-17

申请号：KR1020090039887

申请日：2009-05-07

Applicant: 삼성모바일디스플레이주식회사

Inventor： 강태욱 ,  김우현 ,  지창순 ,  조현래 ,  안성국 ,  이정열 ,  박재목

IPC: H01J37/32 ,  H01L51/56 ,  H05B33/26

CPC classification number: H01L51/0029 ,  H01J37/20 ,  H01J37/32091 ,  H01J37/32568 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/20235

Abstract: PURPOSE: An apparatus for processing plasma is provided to constantly etch the surface of a substrate by maintaining the uniformity of plasma in a chamber. CONSTITUTION: A substrate is arranged in a chamber. A first electrode(104) is arranged in the chamber and is spaced apart from the lower side of the substrate. A second electrode(105) is arranged in the chamber and is spaced apart from the upper side of the substrate. A gap regulating unit(102) regulates a gap between the first electrode and the substrate or a gap between the second electrode and the substrate.

Abstract translation: 目的：提供一种用于处理等离子体的装置，以通过维持室中的等离子体的均匀性来恒定地蚀刻基板的表面。 构成：衬底布置在腔室中。 第一电极（104）布置在腔室中并与衬底的下侧隔开。 第二电极（105）布置在腔室中并与衬底的上侧隔开。 间隙调节单元（102）调节第一电极和衬底之间的间隙或第二电极和衬底之间的间隙。

公开(公告)号：KR101050463B1

公开(公告)日：2011-07-20

申请号：KR1020090039887

申请日：2009-05-07

Applicant: 삼성모바일디스플레이주식회사

Inventor： 강태욱 ,  김우현 ,  지창순 ,  조현래 ,  안성국 ,  이정열 ,  박재목

IPC: H01J37/32 ,  H01L51/56 ,  H05B33/26

CPC classification number: H01L51/0029 ,  H01J37/20 ,  H01J37/32091 ,  H01J37/32568 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/20235

Abstract: A substrate plasma-processing apparatus for plasma-processing a surface of an electrode of an organic light emitting device. The substrate plasma-processing apparatus may adjust the distance between a first electrode and a substrate and adjust the distance between a second electrode and the substrate.

公开(公告)号：KR1020080068201A

公开(公告)日：2008-07-23

申请号：KR1020070005624

申请日：2007-01-18

Applicant: 삼성모바일디스플레이주식회사

Inventor： 류승윤 ,  조현래

IPC: H05B33/10

CPC classification number: H01L27/3223 ,  C23C14/545 ,  H01L51/524 ,  H01L51/56 ,  H01L2251/558

Abstract: An organic light emitting display and a method of monitoring a layer thickness of the same are provided to shorten a manufacturing time of the organic light emitting display without cutting a pixel substrate for monitoring a thickness for each pattern. An organic light emitting display includes a pixel substrate, a pixel, patterns(310-350) for thickness monitoring, and a sealing substrate(120). A pixel region is defined on the pixel substrate. The pixel is formed in the pixel region and includes an organic light emitting device. The patterns for thickness monitoring are formed in the vicinity of the pixel region. The sealing substrate is formed on the pixel substrate to protect the pixel region and includes opening portions for opening the patterns.

Abstract translation: 提供一种有机发光显示器和监测其厚度的方法，以缩短有机发光显示器的制造时间，而不需要切割用于监测每个图案的厚度的像素基板。 有机发光显示器包括像素基板，像素，用于厚度监视的图案（310-350）和密封基板（120）。 像素区域被限定在像素基板上。 像素形成在像素区域中并且包括有机发光器件。 用于厚度监视的图案形成在像素区域附近。 密封基板形成在像素基板上以保护像素区域并且包括用于打开图案的开口部分。