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公开(公告)号：KR100825792B1
公开(公告)日：2008-04-29
申请号：KR1020060111223
申请日：2006-11-10
Applicant: 삼성전자주식회사
CPC classification number: H01L21/67282 , G01R31/2867 , G01R31/2893 , H01L21/67271 , Y10S414/135
Abstract: A handler system for testing a semiconductor device having a versatile function is provided to facilitate a maintenance process by separating a semiconductor element processing unit and a semiconductor element test unit. A semiconductor element processing unit(600) includes a loading part having a tray for storing semiconductor elements and an internal buffer, a sorting part for sorting the tested semiconductor elements, and an unloading part for unloading the sorted tray. A semiconductor element test unit(700) includes a test chamber for testing the semiconductor elements in a parallel testing method. The test chamber includes two or more test spaces. Each of the test spaces of the test chamber includes a second chamber corresponding to a lower part, a first chamber corresponding to an upper part, and a pipeline for connecting the first chamber and the second chamber to each other. A host computer(800) is connected to the semiconductor element test unit through a signal line in order to manage tray information, test results, marking information, and test program information.
Abstract translation: 提供了一种用于测试具有通用功能的半导体器件的处理器系统，以通过分离半导体元件处理单元和半导体元件测试单元来促进维护过程。 半导体元件处理单元（600）包括具有用于存储半导体元件的托盘和内部缓冲器的装载部件，用于分选测试的半导体元件的分拣部件和用于卸载分拣的托盘的卸载部件。 半导体元件测试单元（700）包括用于以并行测试方法测试半导体元件的测试室。 测试室包括两个或多个测试空间。 测试室的每个测试空间包括对应于下部的第二室，对应于上部的第一室和用于将第一室和第二室彼此连接的管道。 主计算机（800）通过信号线与半导体元件测试单元连接，以便管理托盘信息，测试结果，标记信息和测试程序信息。
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公开(公告)号：KR1020070101574A
公开(公告)日：2007-10-17
申请号：KR1020060032743
申请日：2006-04-11
Applicant: 삼성전자주식회사
CPC classification number: G01R31/2865 , G01R31/2862
Abstract: A handler for testing a semiconductor device capable of keeping a stable temperature is provided to decrease yield rate reduction due to temperature variation in a test chamber by dividing the test chamber into a plurality of test spaces and installing a thermoelectric device and a second chamber additionally. A handler for testing a semiconductor device capable of keeping a stable temperature includes a loading unit, a soak chamber, a test chamber, a de-soak chamber, and an unloading unit. A plurality of semiconductor devices in a tray coming into the soak chamber by the loading unit is aging from a predetermined temperature. The test chamber as an inspecting space for the aged semiconductor devices includes a first chamber(350), a second chamber(360) adjacent to the first chamber, and a pair of pipe lines(370,380), being installed to be connected with the first and second chamber(350,360), circulating a medium for temperature control.
Abstract translation: 提供了一种用于测试能够保持稳定温度的半导体器件的处理器，以通过将测试室分成多个测试空间并且另外安装热电装置和第二室来降低由于测试室中的温度变化引起的屈服率降低。 用于测试能够保持稳定温度的半导体器件的处理器包括加载单元，浸泡室，测试室，脱泡室和卸载单元。 通过装载单元进入浸泡室的托盘中的多个半导体装置从预定温度老化。 作为老化半导体器件的检查空间的测试室包括第一室（350），与第一室相邻的第二室（360）和一对管线（370,380），其被安装成与第一室 和第二室（350,360），循环用于温度控制的介质。
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公开(公告)号：KR1020060009470A
公开(公告)日：2006-02-01
申请号：KR1020040057469
申请日：2004-07-23
Applicant: 삼성전자주식회사
Inventor： 강성구
IPC: H01L21/304 , H01L21/68
CPC classification number: H01L21/67057 , H01L21/68742
Abstract: 본 발명은 싱크바닥을 작업자의 허리 위치까지 상승시켜 반도체 제조용 베쓰를 교체하도록 하는 반도체 제조용 웨트 스테이션설비에 관한 것이다.
이를 위한 본 발명의 웨트 스테이션설비는, 싱크바닥과, 상기 싱크바닥 위에 설치된 적어도 하나 이상의 베쓰 받침대와, 상기 다수 개의 받침대 상에 설치되어 상부가 개방되고 일정한 내부공간을 가지고 화학약품을 적재하고 있는 적어도 하나 이상의 베쓰와, 상기 싱크바닥을 관통하여 상기 베쓰 받침대의 하부에 고정되어 상기 베쓰 받침대를 설정된 높이까지 승,하강시키는 적어도 하나 이상의 리프트를 포함한다.
반도체 공정용 베쓰, 베쓰유닛, 베쓰 승/하강-
公开(公告)号：KR1020040066553A
公开(公告)日：2004-07-27
申请号：KR1020030003648
申请日：2003-01-20
Applicant: 삼성전자주식회사
IPC: H01L21/66
CPC classification number: G01R31/287 , H01L2224/32145 , H01L2224/48091 , H01L2224/73265 , H01L2924/15311 , H01L2924/00014
Abstract: PURPOSE: An integrated monitoring burn-in test method for multi-chip package is provided to shorten an interval of a burn-in test and reduce a probability of error occurrence caused by an operator by converting an individual burn-in test into an integrated burn-in test. CONSTITUTION: A multi-chip package into which various kinds of semiconductor devices are integrated is loaded into a chamber of a burn-in apparatus capable of applying at least two scan control signals(P102). An integrated burn-in program capable of testing the multi-chip package is loaded into the burn-in apparatus(P104). A burn-in test is performed on the multi-chip package by using the integrated burn-in program(P114).
Abstract translation: 目的：提供多芯片封装的综合监控老化测试方法，缩短老化测试的间隔时间，并通过将单独的老化测试转换为一体式烧录，降低操作员造成的错误发生概率 在测试 构成：将各种半导体器件集成到其中的多芯片封装被加载到能够施加至少两个扫描控制信号的老化装置的腔室（P102）中。 能够测试多芯片封装的集成老化程序被加载到老化装置（P104）中。 通过使用集成的烧录程序（P114），在多芯片封装上进行老化测试。
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公开(公告)号：KR100351052B1
公开(公告)日：2002-09-05
申请号：KR1020000016464
申请日：2000-03-30
Applicant: 삼성전자주식회사
IPC: H01L21/50
Abstract: 번인 공정에 있어서, 검사용 소켓을 반도체 패키지의 크기와 상관없이 공용으로 사용케 하는 반도체 패키지 가공용 로더에 관해 개시한다. 이를 위하여 본 발명은 반도체 패키지를 검사용 소켓에 정렬시키는 수단을 로더 내부에 형성함으로써 검사용 소켓에 사용된 어뎁터 기능을 대신한다. 따라서 검사용 소켓에서 어뎁터를 제거함으로써 검사용 소켓을 유니버셜 형태(universal type)로 만들 수 있다. 그러므로 검사용 소켓의 제작 비용을 줄이고, 관리에 소요되는 노력을 줄일 수 있다.
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Patent Agency Ranking
公开(公告)号：KR1020010095435A
公开(公告)日：2001-11-07
申请号：KR1020000016464
申请日：2000-03-30
Applicant: 삼성전자주식회사
IPC: H01L21/50
CPC classification number: G01R31/2867 , G01R1/0408 , H01L2224/75 , H01L2224/81
Abstract: PURPOSE: A loader for processing a semiconductor package with a package guide and a method for using the same are provided to apply a test socket to semiconductor packages of different sizes by using a package guide. CONSTITUTION: A loader body(102) is moved by an external signal. A nozzle body(112) including a vacuum line is formed at a lower end of loader body(102). The nozzle body(112) performs a vertical movement by the external signal. A vacuum absorption head(114) is formed at a lower end of the nozzle body(112). The vacuum absorption head(114) is connected with the vacuum line in order to load or unload a semiconductor package(116). A socket cover push head(118) is used for pushing a socket cover of a test socket. A package guide(104,106,108,110) is formed at the inside of the socket cover push head and the outside of the nozzle body(102) and the vacuum absorption head(114). The package guide(104,106,108,110) is opened or shut according to a loading state or a unloading state of the semiconductor package(116).
Abstract translation: 目的：提供一种用于处理具有封装引导件的半导体封装的加载器及其使用方法，以通过使用封装引导件将测试插座施加到不同尺寸的半导体封装。 构成：装载机主体（102）由外部信号移动。 在装载机主体（102）的下端形成包括真空管线的喷嘴体（112）。 喷嘴体（112）通过外部信号进行垂直移动。 在喷嘴体（112）的下端形成真空吸收头（114）。 真空吸收头（114）与真空管线连接，以便加载或卸载半导体封装（116）。 插座盖推头（118）用于推动测试插座的插座盖。 包装引导件（104,106,108,110）形成在插座盖推动头的内部和喷嘴体（102）和真空吸收头（114）的外部。 封装引导件（104,106,108,110）根据半导体封装（116）的装载状态或卸载状态而被打开或关闭。
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公开(公告)号：KR1020100102979A
公开(公告)日：2010-09-27
申请号：KR1020090021318
申请日：2009-03-12
Applicant: 삼성전자주식회사
CPC classification number: G06F11/2733 , G11C29/56 , G11C29/56016
Abstract: PURPOSE: An apparatus and a method for testing a solid state drive are provided to test solid state drives with various shapes and sizes by replacement of a tray. CONSTITUTION: A test unit(10) tests an electric feature by applying a test signal by a solid state drive. A server(20) receives a test result of the solid state drive from the test unit. A classification loading unit(30) classifies the solid state drive transferred from the test unit into a good product and a bad product according to the test result of the server.
Abstract translation: 目的：提供一种用于测试固态驱动器的设备和方法，通过更换托盘来测试各种形状和尺寸的固态驱动器。 构成：测试单元（10）通过固态驱动器应用测试信号来测试电气特征。 服务器（20）从测试单元接收固态驱动器的测试结果。 分类加载单元（30）根据服务器的测试结果将从测试单元传送的固态驱动器分类为良品和不良产品。
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公开(公告)号：KR100790988B1
公开(公告)日：2008-01-03
申请号：KR1020060032743
申请日：2006-04-11
Applicant: 삼성전자주식회사
CPC classification number: G01R31/2865 , G01R31/2862
Abstract: 병렬검사시 피검사 소자의 개수가 증가되거나 자체 발열을 하는 경우에도 테스트 환경의 안정적 온도유지가 가능하고, 안정된 콘택을 유지할 수 있는 반도체 소자 검사용 핸들러에 관해 개시한다. 이를 위해 본 발명은 테스트 챔버를 격벽에 의하여 복수개의 검사공간으로 분리시키고, 각각 분리된 공간에 열전소자를 포함하는 제1 챔버, 제2 챔버 및 상기 제1 및 제2 챔버를 연결하는 파이프라인을 구성하여 액체 냉매를 통하여 반도체 소자의 테스트 환경의 온도를 제어한다. 그리고 안정된 콘택 유지를 위해 각 검사공간에 2개 이상의 가압 인가장치를 설치하여 반도체 소자가 테스터에 안정적으로 연결되도록 한다.
핸들러, 테스트 챔버, 열전소자, 액체 냉매.-
公开(公告)号：KR1020060131449A
公开(公告)日：2006-12-20
申请号：KR1020050051897
申请日：2005-06-16
Applicant: 삼성전자주식회사
Inventor： 강성구
IPC: H01L21/304
Abstract: A wet processing apparatus is provided to secure an optimum processing state and to prevent the contamination of a bath by checking easily an exhaust state of the bath using a plurality of pressure gauges. A wet processing apparatus comprises a bath(120) for storing a chemical solution, an air supply unit, an exhaust unit, and a plurality of pressure gauges. The air supply unit(110) includes an air cleaning filter, wherein the air cleaning filter is installed at an upper portion of the bath. The air supply unit is capable of removing contaminants from the ambient of the bath by supplying a clean air. The exhaust unit(130) is installed at a lower side of the bath. The plurality of pressure gauges(140) are formed on the air supply unit, a periphery of the bath and the exhaust unit, respectively.
Abstract translation: 提供湿式处理装置以确保最佳处理状态，并且通过使用多个压力表容易地检查浴的排气状况来防止浴的污染。 湿式处理装置包括用于储存化学溶液的浴（120），空气供应单元，排气单元和多个压力计。 空气供应单元（110）包括空气净化过滤器，其中空气净化过滤器安装在浴缸的上部。 空气供应单元能够通过提供清洁的空气从浴室的环境中去除污染物。 排气单元（130）安装在浴槽的下侧。 多个压力计（140）分别形成在空气供应单元，浴室的周边和排气单元上。
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公开(公告)号：KR1020030049663A
公开(公告)日：2003-06-25
申请号：KR1020010079954
申请日：2001-12-17
Applicant: 삼성전자주식회사
Inventor： 강성구
IPC: G01R15/12
Abstract: PURPOSE: A digital meter including a wireless device is provided to measure a voltage everywhere by installing the wireless device at the digital meter. CONSTITUTION: A digital meter(20) includes the first electric potential measurement portion(200), the second electric potential measurement portion(220), and a main body(240). The first electric potential measurement portion transmits the electric potential of a reference electric potential line. The second electric potential measurement portion transmits the electric potential of a power source line. The main body measures a voltage by detecting the electric potential difference and indicates the measured voltage. The first electric potential measurement portion includes the first wireless transmission portion in order to transmit the electric potential to the main body. The second electric potential measurement portion includes the second wireless transmission portion in order to transmit the electric potential to the main body.
Abstract translation: 目的：提供包括无线设备的数字仪表，通过在数字仪表上安装无线设备来测量各处的电压。 构成：数字式仪表（20）包括第一电位测量部分（200），第二电位测量部分（220）和主体（240）。 第一电位测量部分传输参考电位线的电位。 第二电位测量部分传输电源线的电位。 主体通过检测电位差来测量电压，并指示测量的电压。 第一电位测量部分包括第一无线传输部分，以将电位传递到主体。 第二电位测量部分包括第二无线传输部分，以将电位传送到主体。
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