반도체 패키지용 기판, 반도체 패키지, 회로 보드 시스템, 반도체 모듈 및 전자 시스템, 및 그 형성 방법들
    3.
    发明公开
    반도체 패키지용 기판, 반도체 패키지, 회로 보드 시스템, 반도체 모듈 및 전자 시스템, 및 그 형성 방법들 无效
    半导体封装衬底,半导体封装,电路板系统,半导体模块和电子系统及其制造方法

    公开(公告)号:KR1020120061492A

    公开(公告)日:2012-06-13

    申请号:KR1020100122826

    申请日:2010-12-03

    CPC classification number: H01L2224/16225 H01L2224/16227 H01L2924/15311

    Abstract: PURPOSE: A semiconductor package, a substrate for the same, a circuit board system, a semiconductor module, an electronic system, and formation methods thereof are provided to improve an integration degree of a semiconductor chip by reducing an interval and a pitch between input/output pads. CONSTITUTION: A bare substrate includes a bump land(111) which is exposed on one side of the bare substrate. A bump adhesion part(147) is formed on the exposed bump land. A metal post(157) is electrically connected to the bump land. A chip pad is exposed on one side of a semiconductor chip. The metal post and the chip pad are electrically connected to each other.

    Abstract translation: 目的:提供半导体封装,其基板,电路板系统,半导体模块,电子系统及其形成方法,以通过减小半导体芯片的间隔和间距来提高半导体芯片的集成度, 输出板。 构成:裸衬底包括暴露在裸衬底一侧的凹凸面(111)。 在露出的隆起焊盘上形成凸块粘附部件(147)。 金属柱(157)电连接到凸起焊盘。 芯片焊盘暴露在半导体芯片的一侧。 金属柱和芯片焊盘彼此电连接。

    반도체 기판 노광 장치
    5.
    发明公开
    반도체 기판 노광 장치 无效
    曝光半导体基板的装置

    公开(公告)号:KR1020080004747A

    公开(公告)日:2008-01-10

    申请号:KR1020060063420

    申请日:2006-07-06

    Inventor: 김미연 유지용

    Abstract: An apparatus for exposing a semiconductor substrate is provided to suppress a lifting phenomenon of a dummy pattern formed in an edge region of the substrate to reduce a step of a chip-in pattern and improve uniformity. An apparatus(100) for exposing a semiconductor substrate(W) includes an illumination unit(102), a library(126), a reticle stage(118), a projection unit(122), and a substrate stage(124). The illumination unit provides illumination light. The library is installed adjacent to the illumination unit. The library houses reticles(114) for forming a dummy pattern(116) having a region where a mesh-type pattern is formed for exposing regions being in contact with an edge of the substrate. The reticle stage supports the reticle selected from the library. The projection unit induces projection light passing the reticle to the substrate. The substrate stage supports the substrate.

    Abstract translation: 提供一种用于暴露半导体衬底的装置,以抑制形成在衬底的边缘区域中的虚拟图案的提升现象,以减少芯片形成的步骤并提高均匀性。 用于曝光半导体衬底(W)的设备(100)包括照明单元(102),库(126),标线片平台(118),投影单元(122)和衬底台(124)。 照明单元提供照明光。 图书馆安装在照明装置附近。 图书馆设有用于形成具有形成网状图案的区域的虚拟图案(116)的掩模版(114),用于暴露与基板边缘接触的区域。 标线台支持从图书馆中选出的掩模版。 投影单元将投射光通过掩模版到基板。 衬底台支撑衬底。

    웨이퍼 에지 전면 노광 시스템 및 이를 이용한 웨이퍼에지 노광 방법
    8.
    发明公开
    웨이퍼 에지 전면 노광 시스템 및 이를 이용한 웨이퍼에지 노광 방법 无效
    WAFER边缘全部接触系统及其边缘接触方法

    公开(公告)号:KR1020050064344A

    公开(公告)日:2005-06-29

    申请号:KR1020030095703

    申请日:2003-12-23

    Abstract: 웨이퍼 에지를 노광하는 시스템과 웨이퍼 에지 노광 방법을 제공한다. 기존의 노광 시스템에 광원에서 나오는 빔을 웨이퍼 전면으로 확장시키기 위한 빔 익스팬더와 웨이퍼 에지 부분만 노광하기 위한 에지 노광 마스크를 도입함으로써 웨이퍼 에지를 전면 노광한다. 웨이퍼 에지를 한번에 전면 노광함으로써 웨이퍼 에지 노광에 걸리는 시간을 단축할 수 있다.

    멀티-칩 패키지 및 그의 제조 방법
    9.
    发明公开
    멀티-칩 패키지 및 그의 제조 방법 无效
    多芯片封装及其制造方法

    公开(公告)号:KR1020110130017A

    公开(公告)日:2011-12-05

    申请号:KR1020100049422

    申请日:2010-05-27

    Abstract: PURPOSE: A multi-chip package and a manufacturing method thereof are provided to improve electrical connecting reliability between a first semiconductor package and a second semiconductor package by electrically interlinking first connecting terminals and second connecting terminals using an interposer chip as intermediation. CONSTITUTION: A multi-chip package comprises a first semiconductor package, a second semiconductor package(200), and an interposer chip(300). The second semiconductor package is arranged on the top of the first semiconductor package. The interposer chip is located between the first semiconductor package and the second semiconductor package. The interposer chip has an accommodating groove which accepts a first package. The interposer chip comprises an interposer board and an interposer terminal(320). The interposer terminal electrically interlinks the first semiconductor package and the second semiconductor package.

    Abstract translation: 目的:提供一种多芯片封装及其制造方法,以通过使用内插器芯片进行电连接来连接第一连接端子和第二连接端子来提高第一半导体封装和第二半导体封装之间的电连接可靠性。 构成:多芯片封装包括第一半导体封装,第二半导体封装(200)和插入器芯片(300)。 第二半导体封装布置在第一半导体封装的顶部。 插入器芯片位于第一半导体封装和第二半导体封装之间。 插入片具有容纳第一封装的容纳槽。 插入器芯片包括插入器板和插入器端子(320)。 插入器端子电连接第一半导体封装和第二半导体封装。

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