Abstract:
PURPOSE: A package on package is provided to improve lamination yield by preventing short circuit between connecting members. CONSTITUTION: A second semiconductor package(200) includes a second substrate(210), a second semiconductor chip(220) and a second connecting member. A connecting part(260) is formed by combining a first connecting member and the second connecting member. The connecting part connects a first semiconductor package and the second semiconductor package. The connecting part includes a core and a fusing conductive layer. The fusing conductive layer is contacted to the lower part of the second substrate and the upper part of a first substrate.
Abstract:
PURPOSE: A semiconductor package, a substrate for the same, a circuit board system, a semiconductor module, an electronic system, and formation methods thereof are provided to improve an integration degree of a semiconductor chip by reducing an interval and a pitch between input/output pads. CONSTITUTION: A bare substrate includes a bump land(111) which is exposed on one side of the bare substrate. A bump adhesion part(147) is formed on the exposed bump land. A metal post(157) is electrically connected to the bump land. A chip pad is exposed on one side of a semiconductor chip. The metal post and the chip pad are electrically connected to each other.
Abstract:
PURPOSE: A semiconductor package and a method of fabricating the same are provided to reduce the thickness of a whole package by inserting a second sub-package into the recess part of a first sub-package. CONSTITUTION: A base substrate comprises a first side and a second side which are opposite to each other. A recess part is formed in a second side. A first semiconductor chip(20) is mounted in a first side. A first ball land(16) is arranged in a second side excluding the recess part. A second semiconductor chip comprises a penetration via which is electrically connected to a connection pad. A second ball land is electrically connected to the penetration via.
Abstract:
An apparatus for exposing a semiconductor substrate is provided to suppress a lifting phenomenon of a dummy pattern formed in an edge region of the substrate to reduce a step of a chip-in pattern and improve uniformity. An apparatus(100) for exposing a semiconductor substrate(W) includes an illumination unit(102), a library(126), a reticle stage(118), a projection unit(122), and a substrate stage(124). The illumination unit provides illumination light. The library is installed adjacent to the illumination unit. The library houses reticles(114) for forming a dummy pattern(116) having a region where a mesh-type pattern is formed for exposing regions being in contact with an edge of the substrate. The reticle stage supports the reticle selected from the library. The projection unit induces projection light passing the reticle to the substrate. The substrate stage supports the substrate.
Abstract:
패키지-온-패키지 형성방법을 제공한다. 웨이퍼 레벨 몰딩(wafer level molding) 공정을 이용하여 웨이퍼를 덮는 봉지재(encapsulant)를 형성한다. 상기 웨이퍼는 다수의 반도체 칩들 및 상기 반도체 칩들을 관통하는 다수의 관통 전극들(through silicon via; TSV)을 구비한다. 상기 봉지재는 상기 관통 전극들에 정렬된 개구부들을 갖는다. 상기 봉지재 및 상기 반도체 칩들을 분할하여 다수의 반도체 패키지들을 형성한다. 상기 반도체 패키지들 중 선택된 하나의 상부에 다른 반도체 패키지를 적층 한다. 상기 다른 반도체 패키지는 상기 관통 전극들에 전기적으로 접속된다.
Abstract:
웨이퍼 에지를 노광하는 시스템과 웨이퍼 에지 노광 방법을 제공한다. 기존의 노광 시스템에 광원에서 나오는 빔을 웨이퍼 전면으로 확장시키기 위한 빔 익스팬더와 웨이퍼 에지 부분만 노광하기 위한 에지 노광 마스크를 도입함으로써 웨이퍼 에지를 전면 노광한다. 웨이퍼 에지를 한번에 전면 노광함으로써 웨이퍼 에지 노광에 걸리는 시간을 단축할 수 있다.
Abstract:
PURPOSE: A multi-chip package and a manufacturing method thereof are provided to improve electrical connecting reliability between a first semiconductor package and a second semiconductor package by electrically interlinking first connecting terminals and second connecting terminals using an interposer chip as intermediation. CONSTITUTION: A multi-chip package comprises a first semiconductor package, a second semiconductor package(200), and an interposer chip(300). The second semiconductor package is arranged on the top of the first semiconductor package. The interposer chip is located between the first semiconductor package and the second semiconductor package. The interposer chip has an accommodating groove which accepts a first package. The interposer chip comprises an interposer board and an interposer terminal(320). The interposer terminal electrically interlinks the first semiconductor package and the second semiconductor package.
Abstract:
PURPOSE: A semiconductor package and a method of forming the same are provided to protect a semiconductor chip from thermal/physical stress due to a molding film by arranging a stress alleviation unit in a semiconductor chip before forming the molding film. CONSTITUTION: In a semiconductor package and a method of forming the same, a semiconductor chip(120) is attached to a substrate(100) through an adhesive. At least one stress alleviation unit(200) is arranged in one side of the semiconductor chip. The semiconductor chip includes a weak part. The stress alleviation unit is overlapped with the weak part. A molding film covers the side of the stress alleviation unit and at least part of the semiconductor chip.