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公开(公告)号：KR100839076B1
公开(公告)日：2008-06-19
申请号：KR1020070012386
申请日：2007-02-06
Applicant: 삼성전자주식회사
IPC: H01L21/66
Abstract: An apparatus for inspecting a multilayer structure, and an apparatus for inspecting materials used in fabricating multilayer semiconductor using the same are provided to accurately locate defect positions within the multilayer structure by detecting diffraction of X-rays from the multilayer structure. An apparatus for inspecting a multilayer structure comprises a multilayer structure, an X-ray generator, and a detection unit. The multilayer structure makes an electromagnetic wave having a wavelength smaller than at least extreme ultraviolet band reflected. The X-ray generator allows X-rays with uniformed wavelength at an angle of incidence where reflection occurs in the multilayer structure, comprising a monochromator. The detection unit comprising a plurality of detection cells that are aligned inline with one another or in matrix, locates a defect position in the multilayer structure by detecting if the X-rays are reflected from the multilayer structure.
Abstract translation: 提供一种用于检查多层结构的装置和用于检查使用其的制造多层半导体的材料的装置，以通过检测来自多层结构的X射线的衍射来精确地定位多层结构内的缺陷位置。 用于检查多层结构的装置包括多层结构，X射线发生器和检测单元。 多层结构使得具有比至少极端的紫外线带反射的波长小的电磁波。 X射线发生器允许具有均匀波长的X射线以入射角在多层结构中发生反射，包括单色仪。 检测单元包括彼此对齐或矩阵排列的多个检测单元，通过检测X射线是否从多层结构反射来定位多层结构中的缺陷位置。
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公开(公告)号：KR101184450B1
公开(公告)日：2012-09-20
申请号：KR1020100097063
申请日：2010-10-05
Applicant: 삼성전자주식회사
CPC classification number: B65B43/265 , B65B5/024 , B65B43/285
Abstract: 자동포장장치와 이를 이용하는 자동포장방법을 개시한다. 자동포장장치는 상면과 하면이 포개지고 적어도 하나의 측면이 접합되지 않은 상태의 박스가 상하로 적층되는 박스적층체를 이용하고, 상기 박스적층체에서 가장 상측에 위치되는 박스로 정의되는 포장박스에 상기 제품이 삽입될 수 있도록 상기 박스적층체를 상측으로 이동시키는 박스공급유닛;과 상기 포장박스의 상면을 들어 올려서 상기 포장박스의 접합되지 않은 측면에 상기 제품이 삽입되는 입구를 형성하는 입구형성유닛;과 상기 입구로 상기 제품을 운반하는 제품공급유닛;과 상기 제품이 상기 포장박스에 삽입된 상태에서 상기 입구가 형성되는 상기 포장박스의 측면을 접합하는 측면접합유닛;을 포함하는 것을 특징으로 한다.
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Patent Agency Ranking
公开(公告)号：KR1020080056907A
公开(公告)日：2008-06-24
申请号：KR1020060130061
申请日：2006-12-19
Applicant: 삼성전자주식회사
IPC: B65D85/86
CPC classification number: B65D85/48 , B65G49/066 , G02F1/1303 , H01L21/6734 , H01L21/6773
Abstract: A cassette for receiving a substrate is provided to prevent the deformation of a substrate having a large size, and to receive and store the substrate easily and stably. A cassette for receiving a substrate includes a couple of sides(20a,20b), upper and lower surfaces(30,40), front and rear surfaces(50,60), a support member(33), a guide member(43) and a fixing member(63). The sides are opposed to each other. The upper and lower surfaces are formed on the upper and lower parts of a couple of sides. The support member is installed on the lower surface to support the lower part of the glass substrate. The guide member is installed on the upper surface and guides each glass substrate to be received. The fixing member is installed on the rear surface to fix the glass substrate in the received state.
Abstract translation: 提供了一种用于接收基板的盒，以防止具有大尺寸的基板的变形，并且容易且稳定地接收和存储基板。 用于接收衬底的盒子包括一对侧面（20a，20b），上表面和下表面（30,40），前表面和后表面（50,60），支撑构件（33），引导构件（43） 和固定构件（63）。 双方相互对立。 上表面和下表面形成在两边的上部和下部。 支撑构件安装在下表面上以支撑玻璃基板的下部。 引导构件安装在上表面上并引导要接收的每个玻璃基板。 固定构件安装在后表面上，以将玻璃基板固定在接收状态。
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公开(公告)号：KR1020080073179A
公开(公告)日：2008-08-08
申请号：KR1020070011864
申请日：2007-02-05
Applicant: 삼성전자주식회사
IPC: H01L21/66
CPC classification number: H01L22/12
Abstract: An apparatus for inspecting defects of a multilayer structure is provided to perform rapidly a defect detecting process by using a detection sensor for detecting a fluorescent X-ray. An X-ray radiation unit radiates an X-ray onto a multilayer structure(20) as an inspecting target in order to satisfy radiation conditions of the X-ray. A detection sensor(40) detects a fluorescent X-ray transmitting the multilayer structure due to defects of the multilayer structure. The X-ray radiation unit includes an X-ray source(11) and a calibrating device(12,13). The calibrating device reflects an X-ray of an inspecting wavelength of the X-rays radiated from the X-ray source to the multilayer structure in order to satisfy reflection conditions.
Abstract translation: 提供一种用于检查多层结构的缺陷的装置，通过使用用于检测荧光X射线的检测传感器来快速执行缺陷检测处理。 X射线辐射单元将X射线照射到作为检查对象的多层结构（20）上，以满足X射线的辐射条件。 检测传感器（40）检测由于多层结构的缺陷而发送多层结构的荧光X射线。 X射线辐射单元包括X射线源（11）和校准装置（12,13）。 校准装置将从X射线源辐射的X射线的检查波长的X射线反射到多层结构，以满足反射条件。
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公开(公告)号：KR1020120071597A
公开(公告)日：2012-07-03
申请号：KR1020100133208
申请日：2010-12-23
Applicant: 삼성전자주식회사
IPC: H01L31/18 , H01L31/042
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , H01L31/042
Abstract: PURPOSE: A laminating apparatus is provided to minimize an installation area for the laminating apparatus by supplying and discharging a solar cell module with an input robot and an exhaust robot. CONSTITUTION: A chamber(10) is formed into a multi-stage. A heater(20) is installed in the inside of the chamber and applies heat to the solar cell module. A cassette(30) is installed in the chamber. An airbag(40) pressurizes the solar cell module provided to the chamber. A vacuum pump(50) sucks air in the airbag.
Abstract translation: 目的：提供层叠装置，通过向输入机器人和排气机器人供给和排出太阳能电池模块来最小化层压装置的安装面积。 构成：室（10）形成多级。 加热器（20）安装在室内，并向太阳能电池模块施加热量。 盒（30）安装在腔室中。 安全气囊（40）对设置到室的太阳能电池模块加压。 真空泵（50）吸入气囊中的空气。
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公开(公告)号：KR100811661B1
公开(公告)日：2008-03-11
申请号：KR1020070006601
申请日：2007-01-22
Applicant: 삼성전자주식회사
CPC classification number: H01L21/67706 , B65G49/063 , B65G2249/00 , G02F1/1303
Abstract: An apparatus for transferring a glass substrate is provided to realize a stable unloading of the glass substrate by absorbing a central side region and a circumference region of the glass substrate to an absorbing unit. A conveyer(10) transfers a vertically arranged glass substrate(G). A loading apparatus(20) loads the glass substrate to the conveyer or unloads the glass substrate loaded on the conveyer from the conveyer. The conveyer includes a carrier(11), a transfer rail(12), and a conveyer frame(13). The carrier loads the glass substrate vertically. The transfer rail supports an upper end of the carrier to guide the movement of the carrier. The transfer rail is installed on an upper portion of the conveyer frame. The conveyer frame supports the carrier when the glass substrate is loaded and unloaded by the loading apparatus. A clamp(11a) is prepared on an end of a circumference of the carrier where an end of a circumference of the glass substrate is inserted to be supported. The loading apparatus includes a turn table for rotating the glass substrate, an absorbing unit being rotated together with the turn table, and a loading apparatus frame. A sound wave generator is further provided to generate sound wave for moving the glass substrate to the absorbing unit.
Abstract translation: 提供一种转印玻璃基板的装置，通过将玻璃基板的中央侧区域和周边区域吸收到吸收单元来实现玻璃基板的稳定的卸载。 传送带（10）传送垂直排列的玻璃基板（G）。 装载装置（20）将玻璃基板装载到输送机上，或从输送机卸载装载在输送机上的玻璃基板。 输送机包括载体（11），输送轨道（12）和输送机框架（13）。 载体垂直装载玻璃基板。 传送轨道支撑载体的上端以引导载体的运动。 传送轨道安装在输送机框架的上部。 当玻璃基板由装载装置装载和卸载时，输送框架支撑载体。 在载体的圆周的端部准备夹持件（11a），其中玻璃基板的圆周的端部被插入以被支撑。 装载装置包括用于旋转玻璃基板的转台，与转台一起旋转的吸收单元和装载装置框架。 还提供一种声波发生器，以产生用于将玻璃基板移动到吸收单元的声波。
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公开(公告)号：KR1020120035517A
公开(公告)日：2012-04-16
申请号：KR1020100097063
申请日：2010-10-05
Applicant: 삼성전자주식회사
CPC classification number: B65B43/265 , B65B5/024 , B65B43/285
Abstract: PURPOSE: An automatic packing machine and an automatic packing method using the same are provided to enable automatic packing of products using a plurality of boxes which are laminated. CONSTITUTION: An automatic packing machine comprises a box supply unit, an inlet forming unit, a product supply unit, and a side bonding unit(30). The box supply unit transfers laminated boxes upward, thereby inserting a product into a packing box which is positioned upmost on the laminated boxes. The inlet forming unit lifts the upper side of the packing box and forms an inlet for the insertion of the product on a side of the packing box which is not bonded. The product supply unit transports the product to the inlet. The side bonding unit bonds the side of the packing box formed with the inlet.
Abstract translation: 目的：提供一种自动包装机和使用该自动包装机的自动包装方法，以便能够使用层压的多个盒子自动包装产品。 构成：自动包装机包括盒供应单元，入口形成单元，产品供应单元和侧面粘合单元（30）。 盒子供应单元向上移动层压箱，从而将产品插入位于层压箱上最上方的包装箱中。 入口形成单元提升包装盒的上侧并形成用于将产品插入未粘合的包装箱侧的入口。 产品供应单元将产品运输到入口。 侧面粘合单元粘合形成有入口的包装盒的侧面。
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