Abstract:
단결정 기판 제조방법 및 그에 의해 제조된 단결정 기판 평가를 위한 열처리 방법을 제공한다. 상기 단결정 기판 제조방법은 단결정 기판을 제공한 후, 상기 기판 내에 베이컨시-산소 복합체를 형성하고, 상기 베이컨시-산소 복합체가 형성된 기판 내에 베이컨시를 주입하고 산소 석출물 핵 생성을 가속화시키는 것을 포함한다. 상기 단결정 기판 평가방법에서는 먼저, 전면으로부터 제1 깊이까지의 영역인 전방 표면층, 후면으로부터 제2 깊이까지인 후방 표면층, 및 상기 전방 표면층과 상기 후방 표면층 사이에 개재된 벌크층을 포함하는 단결정 기판를 제공한다. 상기 기판의 전후방 표면층들 내의 결함들을 제거하여 디누드존을 형성하고, 상기 벌크층 내에 산소 석출물을 형성시킨 후, 상기 산소 석출물을 성장시킨다.
Abstract:
PURPOSE: An image sensor, an operating method thereof, and devices including the same are provided to generate an improved three-dimensional image, a three-dimensional color image, a three-dimensional thermal image, or a two-dimensional color thermal image by using a pixel array including thermal image pixels, depth pixels, and color pixels. CONSTITUTION: If pulse light generated from a light source is reflected from a target, an image sensor senses the reflected pulse light to measure a distance between the image sensor and the target(S10). The image sensor activates a color pixel array, a depth pixel array, and a thermal image pixel array according to a measured distance(S12). [Reference numerals] (S10) Measure a distance between an image sensor and a target; (S12) Activate at least one of color pixel, depth pixel, and thermal image pixel according to the measured distance
Abstract:
The present invention provides a photodetector and an image sensor including the same. The photodetector has a structure which includes conductive patterns and a middle layer interposed between the conductive patterns. A beam is focused on the middle layer by properly adjusting the length of the conductive pattern and the wavelength of the beam to generate joule heat. Therefore, the beam can be detected by changing the electrical resistance of the middle layer.
Abstract:
A method of operating an image sensor comprises the steps of: thermoelectric-cooling a pixel by using a thermoelectric element having a thermoelectric bonding which is integrated in the pixel; and performing a photoelectric conversion operation by using the thermoelectric device. The thermoelectric-cooling step is a step of peltier-cooling the pixel by using a peltier device having a peltier bonding.
Abstract:
PURPOSE: A semiconductor device is provided to reduce the resistance of a word line and a gate induction drain leakage by a gate electrode pattern. CONSTITUTION: A substrate(110) has a trench(111) in an active area. A gate insulation layer(124) is formed in the trench. A gate electrode pattern(130a) is formed on the gate insulation layer and includes a first part which protrudes to the upper side of the substrate. A dielectric pattern is formed on the gate electrode pattern and fills the trench.
Abstract:
An image sensor is provided. The image sensor comprises a substrate; a first material membrane arranged on the substrate and containing chalcogen compounds; and a detecting unit connected to the first material membrane and detecting an electrical change in the first material membrane. The chalcogen compound contains at least one of A_xB_yS_1_-x-y, A_xB_yTe_1_-x-y, and A_xB_ySe_1-x-y (0
Abstract:
PURPOSE: A method for manufacturing mono-crystal substrates, a method for evaluating the mono-crystal substrates, and the mono-crystal substrates are provided to improve the bulk micro defect density in a surface proximal region by performing an additional oxygen precipitate growing process. CONSTITUTION: A mono-crystal ingot is grown(S10). A mono-crystal substrate is processed using the mono-crystal ingot(S20). The mono-crystal substrate undergoes a rapid thermal process(S30). The rapid thermal process includes a first rapid thermal processing step and a second rapid thermal processing step. A bulk-micro-defect inspection is performed(S40).