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公开(公告)号：WO2017146553A1
公开(公告)日：2017-08-31
申请号：PCT/KR2017/002165
申请日：2017-02-27
Applicant: 선문대학교 산학협력단
IPC: H01J37/32 , H01J37/18 , H01J37/147
CPC classification number: H01J37/147 , H01J37/18 , H01J37/32
Abstract: 본 발명은 전자 칼럼을 진공 장비에 설치할 때 사용하는 배선 커넥터에 관한 것으로, 보다 상세하게는 전자칼럼이 사용되는 진공 챔버에서 외부 배선을 위한 피드스루(feedthrough)와 전자칼럼을 배선 연결하며 고정하기 위한 커넥터에 관한 것이다. 상기 컨넥터는 전자칼럼과 소켓 방식으로 연결되는 고정부, 그리고 플렉서블 배선, 및 탄성체를 기본 구성요소로 하여 구성된다.
Abstract translation: 本发明涉及用于在真空设备中安装电子柱的配线连接器，更具体地涉及用于其中使用电子柱的真空室中的配线连接器，用于外部配线的馈通， 用于接线和固定色谱柱的连接器。 该连接器包括以插座方式连接到电子柱的固定部分，柔性布线和弹性体作为基本部件。
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公开(公告)号：KR101405357B1
公开(公告)日：2014-06-13
申请号：KR1020130015832
申请日：2013-02-14
Applicant: 선문대학교 산학협력단
IPC: H01J37/147 , H01J37/06
CPC classification number: H01J3/26 , H01J3/021 , H01J3/12 , H01J3/14 , H01J3/18 , H01J3/30 , H01J37/04 , H01J2237/1205
Abstract: The present invention relates to a micro electron optical column comprising an electron emitter emitting an electron using the electric field electron emission theory; an output electrode part inducing the electron emission on the emitter; and a focusing electrode part flexibly applying a voltage according to the operating distance to control the focusing force of an electronic beam generated from the electron emitter; an acceleration electrode part accelerating the electron emitted by the output electrode part; a limit electrode controlling the amount and size of an electronic beam of the electron accelerated by the acceleration electrode part; and a deflector deflecting the electronic beam on the target.
Abstract translation: 本发明涉及一种微电子光学柱，包括使用电场电子发射理论发射电子的电子发射体; 一个在发射极上引发电子发射的输出电极部分; 以及根据所述操作距离灵活地施加电压的聚焦电极部分，以控制从所述电子发射器产生的电子束的聚焦力; 加速电极部，加速由所述输出电极部发射的电子; 限制电极，控制由加速电极部加速的电子束的电子束的数量和尺寸; 以及使电子束偏转到靶上的偏转器。
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公开(公告)号：KR101357957B1
公开(公告)日：2014-02-05
申请号：KR1020120018664
申请日：2012-02-23
Applicant: 선문대학교 산학협력단
IPC: H01J37/12 , H01J37/147
Abstract: 본 발명은 전자 칼럼에서 사용되는 전자 렌즈의 정전 전극층에 관한 것으로서, 보다 상세하게는 전자 렌즈의 전자 집속 능력을 향상시키고 전자빔을 형성하는 유효 전자의 숫자를 증가시키기 위하여 어퍼쳐 주변에 굴곡을 형성한 정전 전극에 관한 것이다.
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公开(公告)号：KR101268020B1
公开(公告)日：2013-05-27
申请号：KR1020100029615
申请日：2010-03-31
Applicant: 선문대학교 산학협력단
IPC: G02B6/00 , G02F1/1335
Abstract: 본발명은 TFT-LCD의도광판(LGP ; Light Guide Plate)에패턴을형성하는방법에관한것으로서, 보다상세하게는도광판에형성되는패턴의크기, 모양, 분포등 패턴의최적화를쉽게하고효율을증가시킬수 있는방법을제공한다.
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公开(公告)号：KR1020120107625A
公开(公告)日：2012-10-04
申请号：KR1020110025242
申请日：2011-03-22
Applicant: 선문대학교 산학협력단
IPC: H01S1/00
CPC classification number: H01S1/005 , H01J25/76 , H01S3/0903 , H01S2302/02
Abstract: PURPOSE: A miniaturized module for generating electromagnetic waves is provided to efficiently and stably generate the electromagnetic waves from a terahertz region by regularly maintaining heating characteristics. CONSTITUTION: A miniaturized module(1) for generating electromagnetic waves includes an electron emission means(3) which emits electrons and a heat generating means(5) which emits electromagnetic waves from a terahertz region by periodically changing a route of the electrons. The electron emission means comprises an emission source(10) emitting the electrons according to voltage application and a micro lens(20) converting the electrons emitted from the emission source into a parallel beams. The emission source is made of a dispenser cathode material emitting a thermoelectron. The emission source is composed of one of porous tungsten, a barium oxide, a barium strontium oxide, a calcium oxide, and an aluminum oxide. The emission source can be composed of one of molybdenum, a carbon nanotube, diamond-like carbon, and a zinc oxide emitting cold electrons.
Abstract translation: 目的：提供一种用于产生电磁波的小型化模块，通过定期维持加热特性，有效稳定地产生来自太赫兹区域的电磁波。 构成：用于产生电磁波的小型化模块（1）包括发射电子的电子发射装置（3）和通过周期性地改变电子路线而从太赫兹区域发射电磁波的发热装置（5）。 电子发射装置包括根据电压施加发射电子的发射源（10）和将从发射源发射的电子转换为平行光束的微透镜（20）。 发射源由发射热电子的分配器阴极材料制成。 发射源由多孔钨，氧化钡，氧化锶钡，氧化钙和氧化铝中的一种构成。 发射源可以由钼，碳纳米管，类金刚石碳和发射冷电子的氧化锌中的一种构成。
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Patent Agency Ranking
公开(公告)号：KR1020170040785A
公开(公告)日：2017-04-13
申请号：KR1020170042861
申请日：2017-04-03
Applicant: 선문대학교 산학협력단
IPC: H01J1/304
Abstract: 본발명은나노에서수십나노크기의튜브, 기둥또는덩어리형태의구조를가진나노구조팁을구비한초소형전자칼럼에관한것으로서, 보다구체적으로는전압을인가하면끝 부분에높은전기장이형성되어전자를용이하게방출할수 있는나노구조팁을구비하고있으며, 다른전자렌즈부품, 즉전자렌즈어퍼처홀과정렬이용이하며사용이편리한초소형전자칼럼에관한것이다. 본발명의초소형전자칼럼은나노구조팁의크기가소스렌즈의구경보다큰 것을특징으로한다.
Abstract translation: 本发明涉及一种具有具有管，柱或几十纳米大小的银的块状形式，并且更具体euroneun当电压在端部施加到高电场的结构的纳米结构末端的电子柱形成促进电子 可以设置有一个纳米结构提示，放电，到不同的电子透镜成分，即，电子透镜和使用对准和易于使用的微柱的上cheohol。 银纳米尺寸结构的电子柱中，本发明的尖端的特征在于，所述源是比透镜的直径大。
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公开(公告)号：KR101667771B1
公开(公告)日：2016-10-20
申请号：KR1020150008918
申请日：2015-01-19
Applicant: 선문대학교 산학협력단
IPC: H01J37/147 , H01J37/06
Abstract: 본발명은초소형전자컬럼에서사용되는디플렉터에관한것으로서, 보다상세하게는정전 4중극디플렉터에관한것이다. 본발명에따른디플렉터는편향전극외에편향전압이인가되지않는플로팅전극을더 포함하는것을특징으로한다. 그리하여, 구조적인안정을가질수 있을뿐만아니라구동방식의단순함을동시에구비할수 있는것으로그 특성또한우수한성능을확보할수 있다.
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公开(公告)号：KR101417603B1
公开(公告)日：2014-07-09
申请号：KR1020130022157
申请日：2013-02-28
Applicant: 선문대학교 산학협력단
IPC: H01J37/147 , H01J37/153
CPC classification number: H01J37/1471 , H01J2237/1205 , H01J2237/1516
Abstract: The present invention relates to an ultra-small column with a double agliner and, more specifically, to an ultra-small column with a double agliner to compensate an original scanning path and an upper shaft when the original scanning path of a particle beam and the upper shaft out of a limiting aperture are separated; and to compensate efficiently the path of the particle beam by aligning the path of the particle beam to the aperture of the limiting aperture by the double agliners. As the present invention is configured to comprise the ultra-small column with a source lens, the source lens includes two aligner layers to compensate the path of the particle beam.
Abstract translation: 本发明涉及一种具有双层衬板的超小型柱，更具体地说，涉及一种具有双层衬板的超小柱，用于补偿原始扫描路径，当颗粒束的原始扫描路径和 分离出限制孔径的上轴; 并且通过将双粒子束将粒子束的路径对准限制孔的孔径来有效地补偿粒子束的路径。 由于本发明被构造成包括具有源透镜的超小列，源透镜包括两个对准器层，以补偿粒子束的路径。
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公开(公告)号：KR1020130096996A
公开(公告)日：2013-09-02
申请号：KR1020120018664
申请日：2012-02-23
Applicant: 선문대학교 산학협력단
IPC: H01J37/12 , H01J37/147
Abstract: PURPOSE: An electrostatic electrode including a convex part or a concave part around an aperture improves the detection performance of an electronic column by increasing the number of effective electrons in an electron beam. CONSTITUTION: An electrostatic electrode includes an electron lens of an electronic column. A bending part is formed around an aperture of the electrostatic electrode. The plane shape of the bending part corresponds to the shape of the aperture. The cross-sectional shape of the bending part is formed into a concave part (110) or a convex part.
Abstract translation: 目的：包括孔周围的凸部或凹部的静电电极通过增加电子束中的有效电子数来提高电子柱的检测性能。 构成：静电电极包括电子柱的电子透镜。 在静电电极的孔周围形成弯曲部。 弯曲部的平面形状对应于孔的形状。 弯曲部的截面形状形成为凹部（110）或凸部。
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公开(公告)号：KR1020130087278A
公开(公告)日：2013-08-06
申请号：KR1020120008489
申请日：2012-01-27
Applicant: 선문대학교 산학협력단
IPC: H01J37/147
Abstract: PURPOSE: A multi-particle beam column containing an electrode layer with an eccentric aperture is provided to enable an operator to easily control a particle beam column by being equipped with an electrode layer with an eccentric aperture. CONSTITUTION: A particle beam column includes an electron emission source (10), a deflector (50), and an electronic lens (20). The deflector scans electrons emitted from the electron emission source. A multi-particle beam column is formed by combining two or more particle beam columns. The multi-particle beam column is equipped with one or more eccentric electrode layers (130) where an aperture is eccentric from the beam optical axis of an individual column. The eccentric electrode layer is placed below the deflector.
Abstract translation: 目的：提供一种含有具有偏心孔的电极层的多粒子束柱，以使操作者能够通过配备具有偏心孔的电极层来容易地控制粒子束柱。 构成：粒子束列包括电子发射源（10），偏转器（50）和电子透镜（20）。 偏转器扫描从电子发射源发射的电子。 通过组合两个或更多个粒子束柱形成多粒子束柱。 多粒子束柱配备有一个或多个偏心电极层（130），其中孔与单独柱的束光轴偏心。 偏心电极层位于偏转器的下方。
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