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公开(公告)号：KR101346524B1
公开(公告)日：2013-12-31
申请号：KR1020110113873
申请日：2011-11-03
Applicant: 성균관대학교산학협력단
CPC classification number: H01L31/02366 , H01L31/0392 , Y02E10/50
Abstract: 태양전지용 유리 기판의 제조 방법에 있어서, 챔버 내에 위치한 타겟 지지부 상에 산화 금속물을 타겟으로 장착하고, 상기 챔버 내에 위한 서셉터 상에 기판을 장착한다. 상기 기판 및 상기 타겟 간의 타겟 각도를 조절한 후, 상기 기판 상에 상기 타겟 물질을 증착시켜 텍스쳐가 형성된 산화 금속막을 형성한다. 여기서, 상기 타겟 각도는 상기 타겟 표면의 법선과 상기 기판간에 이루는 각으로 정의된다.
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公开(公告)号：KR1020130048938A
公开(公告)日：2013-05-13
申请号：KR1020110113873
申请日：2011-11-03
Applicant: 성균관대학교산학협력단
CPC classification number: H01L31/02366 , H01L31/0392 , Y02E10/50
Abstract: PURPOSE: A method for manufacturing a glass substrate for a solar cell and a sputtering apparatus are provided to improve the photoelectric conversion efficiency of a solar cell including a transparent conduction layer by controlling the angle of a target. CONSTITUTION: A target is mounted on a target support part positioned in a chamber(S110). A substrate is mounted on a susceptor positioned in the chamber(S130). A target angle between the target and the substrate is controlled(S150). A target material is deposited on the substrate to form a metal oxide layer having a texture(S170). [Reference numerals] (AA) Start; (BB) End; (S110) Mount a target; (S130) Mount a substrate on a susceptor; (S150) Control a target angle between the target and the substrate; (S170) Form a metal oxide layer having a texture
Abstract translation: 目的：提供一种太阳能电池用玻璃基板的制造方法和溅射装置，通过控制靶的角度来提高包含透明导电层的太阳能电池的光电转换效率。 构成：将目标安装在位于腔室中的目标支撑部件上（S110）。 衬底安装在位于腔室中的基座上（S130）。 控制靶与基板之间的目标角度（S150）。 靶材料沉积在衬底上以形成具有纹理的金属氧化物层（S170）。 （附图标记）（AA）开始; （BB）结束; （S110）安装目标; （S130）将基板安装在基座上; （S150）控制目标和基板之间的目标角度; （S170）形成具有纹理的金属氧化物层
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公开(公告)号：KR101215110B1
公开(公告)日：2012-12-24
申请号：KR1020110113850
申请日：2011-11-03
Applicant: 성균관대학교산학협력단
IPC: H01L31/04 , H01L31/0236 , H01L31/18
CPC classification number: Y02E10/50 , H01L31/04 , H01L31/0236 , H01L31/18
Abstract: PURPOSE: A method for manufacturing a compliant substrate for a solar cell is provided to simplify manufacturing process by omitting a dry etching mode, a mechanical grooving mode, and a wet etching mode. CONSTITUTION: A frame in which an uneven portion is formed on the surface is prepared(S110). A polymer film is formed on the frame with a spin coating process(S120). The polymer film is hardened(S130). A metal layer is formed on the front side of the polymer film(S140). A first transparent conductive film is formed on the metal layer(S150). A protective film is formed on the rear side of the polymer film(S160). [Reference numerals] (AA) Start; (BB) End; (S110) Preparing a frame with an uneven portion; (S120) Forming a polymer film on a frame with a spin coating process; (S130) Hardening a polymer film; (S140) Forming a metal film on the front side of the polymer film; (S150) Forming a first transparent conductive film on the metal film; (S160) Forming a protection film on the rear of the polymer film
Abstract translation: 目的：提供一种用于制造用于太阳能电池的柔性衬底的方法，以通过省略干蚀刻模式，机械开槽模式和湿蚀刻模式来简化制造工艺。 构成：准备在表面形成有凹凸部的框架（S110）。 用旋涂法在框架上形成聚合物膜（S120）。 聚合物膜被硬化（S130）。 在聚合物膜的前侧形成有金属层（S140）。 在金属层上形成第一透明导电膜（S150）。 在聚合物膜的后侧形成保护膜（S160）。 （附图标记）（AA）开始; （BB）结束; （S110）准备具有不平坦部分的框架; （S120）在旋涂工序的框架上形成聚合物膜; （S130）硬化聚合物膜; （S140）在聚合物膜的正面形成金属膜; （S150）在金属膜上形成第一透明导电膜; （S160）在聚合物膜的背面形成保护膜
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