公开(公告)号：KR100818884B1

公开(公告)日：2008-04-01

申请号：KR1020060118966

申请日：2006-11-29

Applicant: 성균관대학교산학협력단

Inventor： 이내응 ,  김정구 ,  김덕진 ,  윤영배 ,  뉴궨,당남 ,  박성민

IPC: H05B33/10

CPC classification number: H01L51/5256 ,  H01L51/0031 ,  H01L51/56

Abstract: A method for fabricating a transparent organic/inorganic multi barrier coating layers is provided to expand a life span of a device by blocking moisture and oxygen with an encapsulation thin film. A method for fabricating a transparent organic/inorganic multi barrier coating layers includes the steps of: forming an organic layer(30a) on a transparent substrate through a plasma polymerization method using a CCP(Capacitively Coupled Plasma); and forming an inorganic layer(40a) on the organic layer through the plasma polymerization method using the CCP. The substrate is PEN(Polyethylene-2,6-naphthalate). The organic layer is formed by using methylcyclohexane. The inorganic layer is formed using hexamethyldisiloxane. The organic layer is formed by using an organic precursor which forms a transparent polymer. The inorganic layer is formed by using an inorganic metallic precursor having a silicon element which forms the transparent polymer.

Abstract translation: 提供一种用于制造透明有机/无机多屏障涂层的方法，以通过用封装薄膜阻挡水分和氧来扩展器件的使用寿命。 制造透明有机/无机多屏障涂层的方法包括以下步骤：通过使用CCP（电容耦合等离子体）的等离子体聚合方法在透明基板上形成有机层（30a）; 以及通过使用CCP的等离子体聚合法在有机层上形成无机层（40a）。 基材是PEN（聚2,6-萘二甲酸乙二醇酯）。 有机层通过使用甲基环己烷形成。 使用六甲基二硅氧烷形成无机层。 通过使用形成透明聚合物的有机前体形成有机层。 通过使用具有形成透明聚合物的硅元素的无机金属前体形成无机层。