公开(公告)号：KR101345781B1

公开(公告)日：2013-12-27

申请号：KR1020120035140

申请日：2012-04-04

Applicant: 성균관대학교산학협력단

Inventor： 최후미 ,  김동빈 ,  김태성 ,  강상우 ,  신용현 ,  윤석래 ,  이규찬

IPC: G01N15/14 ,  G01N21/47

Abstract: 본발명은입자측정장치및 방법에관한것으로, 입자측정장치는분리가능한 3개의챔버를이용하여기체의입자를측정하는입자측정부, 상기입자측정부를고정시키는테이블, 상기입자측정부와상기테이블을지지하며높낮이조절이가능한지지부재를포함하되, 상기입자측정부는상기지지부재에탈착이가능하며, 상기입자측정부는공정환경의압력이설정된기준압력이상인지여부, 유입되는입자가대전된입자인지여부에따라상기 3개의챔버를선택적으로결합또는분리하여상기입자를측정할수 있다.

公开(公告)号：KR1020130112619A

公开(公告)日：2013-10-14

申请号：KR1020120035140

申请日：2012-04-04

Applicant: 성균관대학교산학협력단

Inventor： 최후미 ,  김동빈 ,  김태성 ,  강상우 ,  신용현 ,  윤석래 ,  이규찬

IPC: G01N15/14 ,  G01N21/47

Abstract: PURPOSE: An apparatus and a method for measuring particles are provided to be applied to various processes because three chambers are separated from or coupled to each other according to process pressures or the electric charge occurrence of the introduced particles. CONSTITUTION: An apparatus for measuring particles comprises a particle measuring part (1000), a table (1100), a lower support member (2000), and a moving member (3000). The particle measuring part measures a gas particle using separable three chambers. The table fixes the particle measuring part. The height-adjustable lower support member supports the lower part of the table. The height-adjustable moving member moves the particle measuring part and the table.

Abstract translation: 目的：提供一种用于测量颗粒的装置和方法，用于各种工艺，因为根据工艺压力或引入颗粒的电荷发生，三个室彼此分离或相互耦合。 构成：用于测量颗粒的装置包括颗粒测量部件（1000），工作台（1100），下支撑部件（2000）和移动部件（3000）。 颗粒测量部分使用可分离的三个室来测量气体颗粒。 该表修复了粒子测量部分。 高度可调的下支撑构件支撑桌子的下部。 高度可调的移动构件移动颗粒测量部分和工作台。