公开(公告)号：KR100806846B1

公开(公告)日：2008-02-22

申请号：KR1020070005608

申请日：2007-01-18

Applicant: 성균관대학교산학협력단

Inventor： 이준신 ,  황성현 ,  정성욱 ,  박형준 ,  이정인

IPC: H01L21/324

CPC classification number: H01L21/324 ,  H01L21/02532 ,  H01L21/02628 ,  H01L21/02667

Abstract: A method for crystallizing an amorphous silicon thin film is provided to coat the silicon thin film with metal particles by immersing a substrate with the amorphous silicon thin film into a metal solution. A metal solution containing a catalytic metal is prepared, and then a substrate(101) deposited with an amorphous silicon thin film(103) is coated with the metal solution. Heat treatment is performed on the coated substrate to crystallize the amorphous silicon thin film. The metal solution further contains a solvent material for melting the catalytic material, and an adhesive material for bonding the catalytic material to the substrate. The metal solution comprises (NiCl2)4H2, (Na8C6H5O7)2H2O, NH4Cl, (NaH2PO2)2H2O, ammonia water and deionized water.

Abstract translation: 提供了一种使非晶硅薄膜结晶的方法，通过将具有非晶硅薄膜的衬底浸入金属溶液中，用金属颗粒涂覆硅薄膜。 制备含有催化金属的金属溶液，然后用金属溶液涂覆沉积有非晶硅薄膜（103）的基板（101）。 在涂覆的基材上进行热处理以使非晶硅薄膜结晶。 金属溶液还含有用于熔化催化材料的溶剂材料和用于将催化材料粘合到基材上的粘合剂材料。 金属溶液包含（NiCl2）4H2，（Na8C6H5O7）2H2O，NH4Cl，（NaH2PO2）2H2O，氨水和去离子水。