다이아몬드 전자 방사 음극, 전자원, 전자 현미경 및전자빔 노광기
    3.
    发明公开
    다이아몬드 전자 방사 음극, 전자원, 전자 현미경 및전자빔 노광기 无效
    钻石电子辐射阴极,电子源,电子显微镜和电子束曝光

    公开(公告)号:KR1020090023328A

    公开(公告)日:2009-03-04

    申请号:KR1020087014482

    申请日:2007-06-27

    Abstract: Intended is to provide an electron radiation cathode of a high brightness, low energy dispersion and a long lifetime. Also intended is to provide a diamond electron radiation cathode, which can be sufficiently stably gripped, which is sharpened at its leading end and which is improved in a field intensity. The diamond electron radiation cathode (110) is characterized in that it is divided into at least three regions, that is, a leading end region (203) for irradiating a column-shaped leading end with electrons, a trailing end region (201) confronting in the longitudinal direction and adapted to be gripped, and a radially thinned intermediate region (202), in that the trailing end region has a sectional area of 0.2 mm2, in that the leading region has a sharpened leading end, and in that the radially thinned intermediate region has a sectional area of 0.1 mm2 at most.

    Abstract translation: 旨在提供高亮度,低能量分散和长寿命的电子辐射阴极。 还旨在提供一种金刚石电子辐射阴极,其能够被充分稳定地夹持,其在其前端被削尖并且在场强度方面得到改善。 金刚石电子辐射阴极(110)的特征在于,其被划分为至少三个区域,即用于用电子照射柱状前端的前端区域(203),面对着的后端区域(201) 以及径向变薄的中间区域(202),其中后端区域具有0.2mm 2的截面面积,其中前导区域具有尖锐的前端,并且其中径向 变薄的中间区域的截面积最多为0.1mm2。

    박막을 갖는 다이아몬드 단결정의 제조 방법 및 박막을 갖는 다이아몬드 단결정
    7.
    发明公开
    박막을 갖는 다이아몬드 단결정의 제조 방법 및 박막을 갖는 다이아몬드 단결정 无效
    用薄膜生产钻石单晶的方法和具有薄膜的金刚石单晶

    公开(公告)号:KR1020080090508A

    公开(公告)日:2008-10-08

    申请号:KR1020087019971

    申请日:2007-12-26

    CPC classification number: C30B29/04 H01L21/02527 H01L21/02609 H01L21/02634

    Abstract: A process in which a low-resistivity phosphorus-doped epitaxial diamond thin film having a resistivity at 300 K of 300 7cm or lower is grown on the main plane of a {111} single crystal substrate under such conditions that a raw-material gas has a phosphorus atom/carbon atom ratio of 3% or higher, characterized in that the main plane has an off angle of 0.50° or larger. Also provided is a diamond single crystal having a low-resistivity phosphorus-doped epitaxial diamond thin film, characterized in that the surface of the thin film has an off angle of 0.50° or larger with the {111} plane and that the low-resistivity phosphorus-doped epitaxial diamond thin film has a resistivity at 300 K of 300 7cm or lower.

    Abstract translation: 在{111}单晶衬底的主平面上生长具有300K的电阻率为300×7cm以下的低电阻率磷掺杂外延金刚石薄膜的工艺,其原料气体具有 磷原子/碳原子数比为3%以上,其特征在于主面的偏角为0.50°以上。 还提供了具有低电阻率磷掺杂外延金刚石薄膜的金刚石单晶,其特征在于,薄膜的表面与{111}面具有0.50°或更大的偏离角,并且低电阻率 磷掺杂的外延金刚石薄膜在300K的电阻率为300±7cm以下。

Patent Agency Ranking