Abstract:
Intended is to provide an electron radiation cathode of a high brightness, low energy dispersion and a long lifetime. Also intended is to provide a diamond electron radiation cathode, which can be sufficiently stably gripped, which is sharpened at its leading end and which is improved in a field intensity. The diamond electron radiation cathode (110) is characterized in that it is divided into at least three regions, that is, a leading end region (203) for irradiating a column-shaped leading end with electrons, a trailing end region (201) confronting in the longitudinal direction and adapted to be gripped, and a radially thinned intermediate region (202), in that the trailing end region has a sectional area of 0.2 mm2, in that the leading region has a sharpened leading end, and in that the radially thinned intermediate region has a sectional area of 0.1 mm2 at most.
Abstract:
A process in which a low-resistivity phosphorus-doped epitaxial diamond thin film having a resistivity at 300 K of 300 7cm or lower is grown on the main plane of a {111} single crystal substrate under such conditions that a raw-material gas has a phosphorus atom/carbon atom ratio of 3% or higher, characterized in that the main plane has an off angle of 0.50° or larger. Also provided is a diamond single crystal having a low-resistivity phosphorus-doped epitaxial diamond thin film, characterized in that the surface of the thin film has an off angle of 0.50° or larger with the {111} plane and that the low-resistivity phosphorus-doped epitaxial diamond thin film has a resistivity at 300 K of 300 7cm or lower.