고 어스펙트비의 구멍을 가지는 작업물의 전기도금 방법
    3.
    发明公开
    고 어스펙트비의 구멍을 가지는 작업물의 전기도금 방법 无效
    电镀具有高比例孔径的工件的方法

    公开(公告)号:KR1020050105280A

    公开(公告)日:2005-11-03

    申请号:KR1020057016921

    申请日:2004-02-04

    Abstract: In order to electroplate workpieces comprising high-aspect ratio holes a method is disclosed comprising the steps bringing the workpiece and at least one anode into contact with a metal plating electrolyte, and applying a voltage between the workpiece and the anodes, to the effect that a current flow is provided to the workpiece. The current flow is a pulse reverse current flow having a frequency of at most about 6 Hertz. According to the frequency each cycle time comprises at least one forward current pulse and at least one reverse current pulse.

    Abstract translation: 为了电镀包括高纵横比孔的工件,公开了一种方法,其包括使工件和至少一个阳极与金属电镀电解质接触并在工件和阳极之间施加电压的步骤,使得 向工件提供电流。 电流是具有至多约6赫兹频率的脉冲反向电流。 根据频率,每个周期时间包括至少一个正向电流脉冲和至少一个反向电流脉冲。

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