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公开(公告)号：KR101924694B1
公开(公告)日：2019-02-21
申请号：KR1020160124525
申请日：2016-09-28
Applicant: 포항공과대학교 산학협력단
IPC: H01L29/423 , H01L29/66 , H01L21/28 , H01L29/78
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