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公开(公告)号：KR101920870B1
公开(公告)日：2018-11-21
申请号：KR1020170118866
申请日：2017-09-15
Applicant: 한국과학기술연구원
Abstract: 본발명은전기적특성비접촉식측정시스템으로서, 특정주파수의전자기파를증폭시키는센싱소자; 상기센싱소자상에배치되어전기광학적특성이측정되는박막; 및상기센싱소자에의하여증폭된전자기파가상기박막을통과하면서발생하는상기박막의전기광학적특성을기초로상기박막의물성을추출하는전기광학적특성측정서버를포함한다.
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