公开(公告)号：KR100826305B1

公开(公告)日：2008-04-30

申请号：KR1020060113648

申请日：2006-11-17

Applicant: 한국과학기술연구원

Inventor： 변윤기 ,  한경섭 ,  박재관 ,  박재환 ,  김동완 ,  최경진 ,  최영진 ,  안명원

IPC: C30B29/38 ,  B82B3/00

Abstract: A method for manufacturing a needle type single crystalline AlN nano-rod is provided to enhance efficiency and to extend a lifetime of the needle type single crystalline AlN nano-rod. An aluminum metal, a hydrochloric gas, and an ammonia gas react under nitrogen gas atmosphere during 10-30 minutes at temperature of 680-720 °C. Aluminum metal powders are positioned in the inside of the quartz tube. The hydrochloric gas/nitrogen is introduced into the inside of the quartz tube. The ammonia gas/nitrogen is introduced into the inside of the quartz tube. In the introduced gas, a volume ratio of HCl/NH3 is 0.02 to 0.05 and a volume ratio of (HCl/N2)/(NH3/N2) is 0.6 to 0.8. The total flow rate of the introduced gas corresponds to a range of 600 to 1000 sccm. A single crystalline nano-rod(110) is formed by introducing the gas in the flow rate.

Abstract translation: 提供一种制造针型单晶AlN纳米棒的方法，以提高针型单晶AlN纳米棒的效率并延长其寿命。 在氮气气氛下，在680-720℃的温度下，在10-30分钟内，将铝金属，盐酸气体和氨气反应。 铝金属粉末位于石英管的内部。 将盐酸气体/氮气引入石英管的内部。 将氨气/氮气引入石英管的内部。 在导入的气体中，HCl / NH 3的体积比为0.02〜0.05，（HCl / N 2）/（NH 3 / N 2）的体积比为0.6〜0.8。 引入气体的总流量对应于600〜1000sccm的范围。 通过以流量引入气体形成单晶纳米棒（110）。