N-터셔리-부톡시카르보닐말레이미드 단량체 제조방법
    1.
    发明授权

    公开(公告)号:KR1019930009814B1

    公开(公告)日:1993-10-11

    申请号:KR1019910010273

    申请日:1991-06-21

    Abstract: This is a new N-tert-butoxycarbonylmaleimide (t-BOCMI) of formula (I) . The method comprises (A) reacting maleimide and furan and forming 3,6-epoxy- 1,2,3,6-tetrahydrophthalimide by Diels - Alder reaction; (B) making N-(t-butoxycarbonyl)3,6-epoxy- 1,2,3,6- tetrahydrophthalimide by reacting (A) and di-t- butyldicarbonate; and (C) heating and decomposing (B) in toluen and getting final product of (I). Total process yield is 87% and melting pt. of the product is 62 deg.C. The product is identified by IR, C13 and H1 NMR, MS, GC/MS, and component analysis. The above t-BOCMI is a very good resist material.

    Abstract translation: 这是式(I)的新的N-叔丁氧基羰基马来酰亚胺(t-BOCMI)。 该方法包括(A)使马来酰亚胺和呋喃反应,并通过Diels-Alder反应形成3,6-环氧-1,2,3,6-四氢邻苯二甲酰亚胺; (B)通过使(A)和二碳酸二叔丁酯反应制备N-(叔丁氧基羰基)3,6-环氧-1,2,3,6-四氢邻苯二甲酰亚胺; 和(C)在甲苯中加热分解(B)并得到(I)的最终产物。 总工艺产量为87%,熔点pt。 的产品是62摄氏度 该产品通过IR,C13和H1 NMR,MS,GC / MS和组分分析鉴定。 上述t-BOCMI是一种很好的抗蚀材料。

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