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公开(公告)号：KR100910613B1
公开(公告)日：2009-08-04
申请号：KR1020070022899
申请日：2007-03-08
Applicant: 한국과학기술원
CPC classification number: H01L39/2432 , C23C14/562 , H01L39/2422
Abstract: 초전도 테이프 선재의 연속 제조장치에 관해 개시한다. EDDC(Evaporation using Drum in Dual Chamber) 방식은 고온 초전도 테이프 선재를 대량 생산하는 데 필요한 적합한 방식으로 확인되었다. 그러나 이 방법은 한정된 길이의 선재에만 공정을 적용할 수 있다는 것이 단점이다. EDDC 방식을 임의로 긴 선재에 적용하기 위하여 드럼에 두 개의 릴을 장착하여 긴 선재를 감고 풀고 하는 방식으로 공급할 수 있다. 그러나 이때 중요한 문제점은 드럼 위에 나선방식으로 감긴 선재의 이송방식이다. 본 발명은 몇 개의 분리된 무한궤도 벨트를 이용한 것으로서, 이 벨트들이 선재를 싣고 드럼의 축 방향으로 이동함으로써, 선재가 드럼 주위에 연속적 나선감김을 실현하면서 이송되도록 한다.
초전도, 테이프, 선재, EDDC, 무한궤도, 벨트, 홈, 이송, 지지턱부, 연속-
公开(公告)号：KR1020080082265A
公开(公告)日：2008-09-11
申请号：KR1020070022899
申请日：2007-03-08
Applicant: 한국과학기술원
CPC classification number: H01L39/2432 , C23C14/562 , H01L39/2422
Abstract: An apparatus for continuously manufacturing a superconducting tape is provided to apply an EDDC(Evaporation using Drum in Dual Chamber) scheme to an arbitrarily long tape member by continuously supplying and recollecting the tape without damaging the superconducting tape. An apparatus for continuously manufacturing a superconducting tape includes a chamber, a hollow cylindrical drum(102), a release reel(104a), a winding reel(104b), and a transfer unit. A superconducting material is deposited in the chamber. The hollow cylindrical drum is installed in the chamber and arranges a superconducting tape material on an outer periphery thereof. The cylindrical drum heats the superconducting tape material. The release reel is installed on one end of the cylindrical drum and supplies the superconducting tape material, on which the superconducting material is deposited. The winding reel is implemented on the other end of the cylindrical drum and recollects the superconducting tape material after a deposition process. The transfer unit transfers the superconducting tape material from the release reel to the winding reel.
Abstract translation: 提供一种用于连续制造超导带的设备，用于通过连续地提供和回收带而不损坏超导带来将EDDC（使用双腔蒸发鼓）方案应用于任意长的带部件。 一种用于连续制造超导带的装置，包括一个腔室，一个中空的圆筒形鼓（102），一个释放卷轴（104a），一个卷绕卷轴（104b）和一个传送单元。 超导材料沉积在腔室中。 中空圆柱形滚筒安装在腔室中，并在其外周上布置超导带材料。 圆柱形滚筒加热超导带材料。 释放卷轴安装在圆筒形滚筒的一端，并提供超导材料，超导材料在其上沉积。 卷绕卷轴在圆柱形滚筒的另一端上实现，并且在沉积工艺之后重新收集超导带材料。 转印单元将超导带材料从释放卷轴传送到卷绕卷轴。
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公开(公告)号：KR100856545B1
公开(公告)日：2008-09-04
申请号：KR1020070055508
申请日：2007-06-07
IPC: H01L21/203 , H01L21/20 , H01L21/02 , B82Y40/00
CPC classification number: H01L21/02601 , B82Y40/00 , C23C14/223 , C23C14/3407 , H01L21/02266
Abstract: A method and an apparatus for fabricating a thin film by using a nano-particle beam are provided to form easily the thin film having a complicated ratio of components by eliminating an additional chemical reaction. Nano-particles are formed by using nano-powders(106) as components of a thin film. The nano-particles are electrified. The electrified nano-particles are changed into the accelerated nano-particle beams by applying electric field to the electrified nano-particles. The accelerated nano-particle beams become components of a thin film by causing collision between the accelerated nano-particle beams and a substrate(136). The process for electrifying the nano-particles includes a process for generating plasma in a mixing state of the nano-powders and an inert gas.
Abstract translation: 提供了通过使用纳米粒子束制造薄膜的方法和装置，通过消除额外的化学反应容易地形成具有复杂比例的组分的薄膜。 通过使用纳米粉末（106）作为薄膜的组分形成纳米颗粒。 纳米颗粒通电。 带电的纳米粒子通过向带电的纳米粒子施加电场而变成加速的纳米粒子束。 通过引起加速的纳米粒子束与衬底（136）之间的碰撞，加速的纳米粒子束成为薄膜的成分。 用于使纳米颗粒带电的方法包括在纳米粉末和惰性气体的混合状态下产生等离子体的方法。
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