公开(公告)号：KR1020110043043A

公开(公告)日：2011-04-27

申请号：KR1020090099974

申请日：2009-10-20

Applicant: 한국과학기술원

Inventor： 조규성 ,  김현기 ,  배준형 ,  차보경 ,  전호상 ,  김종열

IPC: H01L27/146 ,  A61B6/12

CPC classification number: H01L27/14625 ,  H01L27/14627 ,  H01L27/14658 ,  H01L27/14676 ,  H01L27/14685 ,  H04N5/32

Abstract: PURPOSE: A sensor device for an x-ray digital image, a digital image device for an x-ray, and a manufacturing method of the x-ray digital image sensor are provided to directly receive a light from a scintillator on a corresponding pixel without crosstalk with another pixels, thereby improving an effective signal. CONSTITUTION: In a sensor device for an x-ray digital image, a digital image device for an x-ray, and a manufacturing method of the x-ray digital image sensor, a plurality of image sensors(260) comprises a photo diode having an area less than a predetermined value by reducing a photo diode area ratio per unit pixel area. A plurality of image sensors are corresponded to each pixel on a substrate. A micro lens(210) is bonded in the photo diode of the each image sensor. A scintillator is deposited on the micro lens to be a pixel.

Abstract translation: 目的：提供一种用于x射线数字图像的传感器装置，用于x射线的数字图像装置和x射线数字图像传感器的制造方法，以直接从相应像素上的闪烁体接收光，而无需 与另一个像素串扰，从而改善有效信号。 构成：在用于x射线数字图像的传感器装置，用于x射线的数字图像装置和x射线数字图像传感器的制造方法中，多个图像传感器（260）包括光电二极管，其具有 通过降低每单位像素面积的光电二极管面积比而小于预定值的面积。 多个图像传感器对应于基板上的每个像素。 在每个图像传感器的光电二极管中接合微透镜（210）。 闪烁体沉积在微透镜上成为像素。

公开(公告)号：KR101078694B1

公开(公告)日：2011-11-01

申请号：KR1020090099974

申请日：2009-10-20

Applicant: 한국과학기술원

Inventor： 조규성 ,  김현기 ,  배준형 ,  차보경 ,  전호상 ,  김종열

IPC: H01L27/146 ,  A61B6/12

Abstract: 엑스선디지털이미지센서장치, 엑스선디지털이미지장치및 엑스선디지털이미지센서제조방법이개시된다. 본발명은기판; 픽셀단위면적당포토다이오드면적비율을감소시켜소정의값 이하의면적을가지는포토다이오드를포함하고, 상기기판위의각각의픽셀에대응하는복수의이미지센서; 상기복수의이미지센서각각의포토다이오드위에접합된마이크로렌즈; 및상기마이크로렌즈위에증착되어픽셀화된섬광체를포함하는, 엑스선디지털이미지센서장치를제공한다. 본발명의실시예들에의하면, 엑스선이미지센서의구조를개선함으로써, 이미지센서의각 픽셀위에서섬광된빛을다른픽셀로크로스토킹되지않고해당픽셀에서바로수광하여전기적신호로변환된유효신호를향상시킬수 있고, 엑스선촬영에요구되는환자의피폭량의감소시킬수 있다.