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公开(公告)号：KR100819062B1
公开(公告)日：2008-04-03
申请号：KR1020070026774
申请日：2007-03-19
Applicant: 한국전자통신연구원
CPC classification number: C01G19/00 , C01P2002/70 , C01P2002/84 , C01P2004/03 , C01P2006/40 , C23C18/1216 , C23C18/14 , G03F7/0042 , Y10S430/143
Abstract: A method for synthesizing an indium tin oxide electron beam resist and a method for forming an ITO pattern are provided to form a pattern in various forms according to resolution of an electron beam recorder, and solve problems caused during an etching process or lift-off process. A method for synthesizing an indium tin oxide(ITO) electron beam resist includes the steps of: providing indium chloride tetrahydrate and tin chloride dihydrate; and dissolving the indium chloride tetrahydrate and tin chloride dihydrate in 2-ethoxy ethanol to synthesize the ITO electron beam resist. A method for forming an ITO pattern includes the steps of: (200) synthesizing the ITO electron beam resist; (220) coating a substrate with the synthesized ITO electron beam resist to form an ITO electron beam resist film; (240,260) forming an ITO electron beam resist pattern by patterning the ITO electron beam resist film using an electron beam recorder; and (280) heat-treating the ITO electron beam resist pattern to form the ITO pattern. Further, the 2-ethoxy ethanol is used as solvent and stabilizer.
Abstract translation: 提供了一种用于合成铟锡氧化物电子束抗蚀剂的方法和用于形成ITO图案的方法，以根据电子束记录器的分辨率形成各种形式的图案，并且解决在蚀刻处理或剥离过程中引起的问题 。 铟锡氧化物（ITO）电子束抗蚀剂的合成方法包括以下步骤：提供氯化铟四水合物和氯化锡二水合物; 并将氯化铟四水合物和氯化锡二水合物溶解在2-乙氧基乙醇中以合成ITO电子束抗蚀剂。 一种形成ITO图形的方法包括以下步骤：（200）合成ITO电子束抗蚀剂; （220）用合成的ITO电子束抗蚀剂涂覆基板以形成ITO电子束抗蚀膜; （240,260），通过使用电子束记录器对ITO电子束抗蚀剂膜进行图案化而形成ITO电子束抗蚀剂图案; 和（280）对ITO电子束抗蚀剂图案进行热处理以形成ITO图案。 此外，使用2-乙氧基乙醇作为溶剂和稳定剂。
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公开(公告)号：KR1020080085368A
公开(公告)日：2008-09-24
申请号：KR1020070026775
申请日：2007-03-19
Applicant: 한국전자통신연구원
CPC classification number: B82Y30/00 , B82Y40/00 , C01B32/174 , C01B2202/34 , C01B2202/36 , B82B3/0009 , B82B3/0061 , C01G23/047
Abstract: A method for preparing carbon nanotubes coated with titanium dioxide is provided to produce the carbon nanotubes which have characteristics of both carbon nanotubes and titanium dioxide nanowires and are usable as gas sensors, photocatalysts, etc. A method for preparing carbon nanotubes(16') coated with titanium dioxide includes the steps of: (a) functionalizing carbon nanotubes with hydrophilic groups; (b) mixing the hydrophilically functionalized carbon nanotubes with a solution containing a titanium dioxide precursor; (c) purifying carbon nanotubes coated with the titanium dioxide precursor from a mixed solution of the carbon nanotubes and titanium dioxide precursor; and (d) heat-treating the purified carbon nanotubes coated with the titanium dioxide precursor. Further, the carbon nanotubes are single-wall carbon nanotubes or multi-wall carbon nanotubes.
Abstract translation: 提供了一种制备涂覆有二氧化钛的碳纳米管的方法，以制备具有碳纳米管和二氧化钛纳米线特性的碳纳米管，并且可用作气体传感器，光催化剂等。一种制备涂覆有碳纳米管的碳纳米管（16'）的方法 二氧化钛包括以下步骤：（a）用亲水基团官能化碳纳米管; （b）将亲水官能化的碳纳米管与含有二氧化钛前体的溶液混合; （c）从碳纳米管和二氧化钛前体的混合溶液中净化涂覆有二氧化钛前体的碳纳米管; 和（d）对涂覆有二氧化钛前体的纯化碳纳米管进行热处理。 此外，碳纳米管是单壁碳纳米管或多壁碳纳米管。
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公开(公告)号：KR100912807B1
公开(公告)日：2009-08-18
申请号：KR1020070026775
申请日：2007-03-19
Applicant: 한국전자통신연구원
CPC classification number: B82Y30/00 , B82Y40/00 , C01B32/174 , C01B2202/34 , C01B2202/36
Abstract: 이산화티탄이 균일하게 코팅된 탄소나노튜브를 제공한다. 본 발명에서는 탄소나노튜브를 친수성기로 기능화시키는 단계; 상기 친수성으로 기능화된 탄소나노튜브를 이산화티탄 전구체를 포함하는 용액에 혼합하는 단계; 상기 탄소나노튜브와 상기 이산화티탄 전구체의 혼합 용액으로부터 이산화티탄 전구체가 코팅된 탄소나노튜브를 정제하는 단계; 및 상기 정제된 이산화티탄 전구체가 코팅된 탄소나노튜브을 열처리하는 단계; 를 포함한다. 이와 같이 형성된 이산화티탄이 균일하게 코팅된 탄소나노튜브는 탄소나노튜브와 이산화티탄 나노와이어의 특성을 동시에 보유함으로, 태양전지, 전계방출 디스플레이 소자, 가스센서, 광촉매 등으로 사용할 수 있다.
이산화티탄, 탄소나노튜브, 이산화티탄이 코팅된 탄소나노튜브
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