公开(公告)号：KR100932522B1

公开(公告)日：2009-12-17

申请号：KR1020070126490

申请日：2007-12-07

Applicant: 한국전자통신연구원

Inventor： 문승언 ,  박종혁 ,  이홍열 ,  박소정 ,  곽준혁 ,  맹성렬 ,  박강호 ,  김종대

IPC: H01L21/20 ,  H01L29/84 ,  H01L21/203 ,  H01L21/205

Abstract: A method for selectively depositing a metal oxide nano material and a gas sensor using the same are provided to improve crystallization through a rapid thermal process by using a micro heater and to remove the moisture attached on the surface of a nano line. A substrate removing a central region is provided. A membrane(20) is formed in an upper part of the substrate. A micro-heater electrode(40) is formed in the upper part of the membrane of the central region. An insulating layer(30) covering the micro heater is formed in the upper part of the membrane. A sensing electrode(50) is formed in the upper part of the insulating layer of the micro heater electrode part. The metal oxide nano material is deposited in an upper part of the sensing electrode.

Abstract translation: 提供了一种用于选择性地沉积金属氧化物纳米材料的方法和使用该方法的气体传感器，以通过使用微型加热器的快速热处理来改善结晶并且去除附着在纳米线表面上的水分。 提供去除中心区域的衬底。 膜（20）形成在基板的上部。 微型加热器电极（40）形成在中心区域的膜的上部。 覆盖微型加热器的绝缘层（30）形成在膜的上部。 感测电极（50）形成在微型加热器电极部分的绝缘层的上部。 金属氧化物纳米材料沉积在感测电极的上部。

公开(公告)号：KR1020090059568A

公开(公告)日：2009-06-11

申请号：KR1020070126490

申请日：2007-12-07

Applicant: 한국전자통신연구원

Inventor： 문승언 ,  박종혁 ,  이홍열 ,  박소정 ,  곽준혁 ,  맹성렬 ,  박강호 ,  김종대

IPC: H01L21/20 ,  H01L29/84 ,  H01L21/203 ,  H01L21/205

CPC classification number: C23C16/047 ,  C23C16/40

Abstract: A method for selectively depositing a metal oxide nano material and a gas sensor using the same are provided to improve crystallization through a rapid thermal process by using a micro heater and to remove the moisture attached on the surface of a nano line. A substrate removing a central region is provided. A membrane(20) is formed in an upper part of the substrate. A micro-heater electrode(40) is formed in the upper part of the membrane of the central region. An insulating layer(30) covering the micro heater is formed in the upper part of the membrane. A sensing electrode(50) is formed in the upper part of the insulating layer of the micro heater electrode part. The metal oxide nano material is deposited in an upper part of the sensing electrode.

Abstract translation: 提供了选择性地沉积金属氧化物纳米材料的方法和使用其的气体传感器，以通过使用微加热器通过快速热处理来改善结晶，并除去附着在纳米线表面上的水分。 提供去除中心区域的衬底。 膜（20）形成在基板的上部。 微加热器电极（40）形成在中心区域的膜的上部。 覆盖微加热器的绝缘层（30）形成在膜的上部。 感测电极（50）形成在微加热器电极部分的绝缘层的上部。 金属氧化物纳米材料沉积在感测电极的上部。