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公开(公告)号：KR1020090059568A
公开(公告)日：2009-06-11
申请号：KR1020070126490
申请日：2007-12-07
Applicant: 한국전자통신연구원
IPC: H01L21/20 , H01L29/84 , H01L21/203 , H01L21/205
CPC classification number: C23C16/047 , C23C16/40
Abstract: A method for selectively depositing a metal oxide nano material and a gas sensor using the same are provided to improve crystallization through a rapid thermal process by using a micro heater and to remove the moisture attached on the surface of a nano line. A substrate removing a central region is provided. A membrane(20) is formed in an upper part of the substrate. A micro-heater electrode(40) is formed in the upper part of the membrane of the central region. An insulating layer(30) covering the micro heater is formed in the upper part of the membrane. A sensing electrode(50) is formed in the upper part of the insulating layer of the micro heater electrode part. The metal oxide nano material is deposited in an upper part of the sensing electrode.
Abstract translation: 提供了选择性地沉积金属氧化物纳米材料的方法和使用其的气体传感器，以通过使用微加热器通过快速热处理来改善结晶，并除去附着在纳米线表面上的水分。 提供去除中心区域的衬底。 膜（20）形成在基板的上部。 微加热器电极（40）形成在中心区域的膜的上部。 覆盖微加热器的绝缘层（30）形成在膜的上部。 感测电极（50）形成在微加热器电极部分的绝缘层的上部。 金属氧化物纳米材料沉积在感测电极的上部。
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公开(公告)号：KR1020100072999A
公开(公告)日：2010-07-01
申请号：KR1020080131573
申请日：2008-12-22
Applicant: 한국전자통신연구원
CPC classification number: G01P1/023 , B81B2201/0235 , G01P5/12 , G01P15/18 , H01L21/20
Abstract: PURPOSE: A thermal convection type micro-acceleration measuring apparatus and a method for fabricating the same are provided to accurately measure the direction and the size of acceleration by including two pairs of temperature sensors. CONSTITUTION: An elastic thin film is formed on the upper side of a substrate(100). A heating unit(120) is formed on the upper side of the elastic thin film and is heated by an applied current. Two pairs of temperature sensors(130) are symmetrically arranged on the upper side of the elastic thin film based on the heating unit. A calculating circuit measures acceleration using the sensed temperature.
Abstract translation: 目的：提供热对流型微加速度测量装置及其制造方法，通过包括两对温度传感器来精确地测量加速度的方向和尺寸。 构成：在基板（100）的上侧形成弹性薄膜。 在弹性薄膜的上侧形成加热单元（120），并通过外加电流进行加热。 基于加热单元，两对温度传感器（130）对称地布置在弹性薄膜的上侧。 计算电路使用感测到的温度来测量加速度。
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Patent Agency Ranking
公开(公告)号：KR101047363B1
公开(公告)日：2011-07-07
申请号：KR1020080131672
申请日：2008-12-22
Applicant: 한국전자통신연구원
Abstract: 본 발명은 다중 기능 센서 및 이의 제조 방법에 관한 것으로, 다양한 환경 정보를 수집하면서도 전체 소자의 크기가 작으며, 적은 소모 전력을 갖는 다중 기능 센서를 제공한다.
이를 위하여, 본 발명의 일실시 예에 따른 다중 기능 센서는, 기판; 상기 기판 상에 전극과 다중 기능 소재의 적층 구조로 형성되며, 서로 다른 주변 환경 정보를 취득하는 다 수의 감지부; 및 상기 기판 상에 제 1 하부 전극, 상기 다중 기능 소재 및 제 1 상부 전극의 적층 구조로 형성되며, 가해지는 진동에 의하여 전력을 발생시키는 자가 발전부를 포함한다.
상술한 바와 같이 본 발명은, 하나의 기판 상에 다양한 환경 정보를 수집하는 다 수의 감지부를 일괄하여 형성함으로써, 그 크기가 작으며 소모 전력이 적고 자가 발전이 가능한 다중 기능 센서를 제공할 수 있는 이점이 있다.
다중 기능 센서, 다중 기능 소재, 자가 발전-
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公开(公告)号：KR1020100073086A
公开(公告)日：2010-07-01
申请号：KR1020080131672
申请日：2008-12-22
Applicant: 한국전자통신연구원
CPC classification number: G01D21/02 , B82Y15/00 , G01D5/24452 , G01K7/16
Abstract: PURPOSE: An own generating multi-functional sensor and a manufacturing method thereof are provided to enable own power-generation with low consumable power and reduce the size of elements despite collecting various environmental information. CONSTITUTION: An own generating multi-functional sensor comprises an ultraviolet ray sensor(101), a temperature sensing unit(102), a humidity sensor(103), a heater(104), a gas detector unit(105), a vibration sensor(106), and a own generation unit(107). The elements are formed on one substrate(111). A laminating structure made of electrode and multi-functional materials is formed on the substrate. The sensors acquire different environmental information. The own generation unit is formed on the substrate wherein a fist bottom electrode, a multi-functional material, and a first top electrode are laminated. The own generation unit greatens electricity by applied vibration.
Abstract translation: 目的：提供一种自己生成的多功能传感器及其制造方法，以便能够以低消耗功率自动发电，并且尽管收集各种环境信息而减小元件的尺寸。 构成：本发明的多功能传感器包括紫外线传感器（101），温度检测单元（102），湿度传感器（103），加热器（104），气体检测器单元（105），振动传感器 （106）和自身生成单元（107）。 元件形成在一个基板（111）上。 在基板上形成由电极和多功能材料制成的层叠结构。 传感器获取不同的环境信息。 本发明单元形成在基板上，其中层叠有第一底部电极，多功能材料和第一顶部电极。 自主生产单元通过施加振动来增强电力。
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公开(公告)号：KR1020080052251A
公开(公告)日：2008-06-11
申请号：KR1020070061450
申请日：2007-06-22
Applicant: 한국전자통신연구원 , 고려대학교 산학협력단
IPC: H01L21/027 , B82Y40/00
CPC classification number: H01L21/0274 , B82Y40/00 , G03F7/70283 , G03F7/705
Abstract: A method for manufacturing an electronic device using a nanowire is provided to reduce a manufacturing cost and a manufacturing time for the electronic device by reducing a process using an E-beam. An electrode is formed on a substrate(S11). Plural nanowires are applied on the substrate on which the electrode is formed(S12). An image with respect to the substrate on which the nanowire and the electrode are formed is captured(S13). A virtual connection line connecting the nanowire to the electrode is drawn on the image by using an electrode pattern simulated through a computer program(S14). A photoresist for an E-beam is applied onto the substrate(S15). The photoresist formed on a position corresponding to the virtual connection line and the electrode pattern is removed by an E-beam lithography process(S16). A metal layer is deposited on the substrate(S17). The photoresist remaining on the substrate is removed by a lift-off process(S18).
Abstract translation: 提供一种使用纳米线制造电子装置的方法，通过减少使用电子束的处理来降低电子装置的制造成本和制造时间。 在基板上形成电极（S11）。 在形成电极的基板上施加多个纳米线（S12）。 拍摄相对于其上形成有纳米线和电极的基板的图像（S13）。 通过使用通过计算机程序模拟的电极图案，在图像上画出将纳米线连接到电极的虚拟连接线（S14）。 将用于电子束的光致抗蚀剂施加到基板上（S15）。 通过电子束光刻处理去除在与虚拟连接线和电极图案对应的位置上形成的光致抗蚀剂（S16）。 在基板上沉积金属层（S17）。 通过剥离工艺去除残留在基板上的光致抗蚀剂（S18）。
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公开(公告)号：KR100932522B1
公开(公告)日：2009-12-17
申请号：KR1020070126490
申请日：2007-12-07
Applicant: 한국전자통신연구원
IPC: H01L21/20 , H01L29/84 , H01L21/203 , H01L21/205
Abstract: A method for selectively depositing a metal oxide nano material and a gas sensor using the same are provided to improve crystallization through a rapid thermal process by using a micro heater and to remove the moisture attached on the surface of a nano line. A substrate removing a central region is provided. A membrane(20) is formed in an upper part of the substrate. A micro-heater electrode(40) is formed in the upper part of the membrane of the central region. An insulating layer(30) covering the micro heater is formed in the upper part of the membrane. A sensing electrode(50) is formed in the upper part of the insulating layer of the micro heater electrode part. The metal oxide nano material is deposited in an upper part of the sensing electrode.
Abstract translation: 提供了一种用于选择性地沉积金属氧化物纳米材料的方法和使用该方法的气体传感器，以通过使用微型加热器的快速热处理来改善结晶并且去除附着在纳米线表面上的水分。 提供去除中心区域的衬底。 膜（20）形成在基板的上部。 微型加热器电极（40）形成在中心区域的膜的上部。 覆盖微型加热器的绝缘层（30）形成在膜的上部。 感测电极（50）形成在微型加热器电极部分的绝缘层的上部。 金属氧化物纳米材料沉积在感测电极的上部。
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