公开(公告)号：KR1020110023019A

公开(公告)日：2011-03-08

申请号：KR1020090080595

申请日：2009-08-28

Applicant: 한국표준과학연구원

Inventor： 김재완 ,  김종안 ,  강주식 ,  안정호

IPC: G01B11/00 ,  G02B5/122

Abstract: PURPOSE: A high resolution interferometer using multi-pass optical configuration is provided to improve resolution function by simplifying the structure of an optical system and increasing optical paths. CONSTITUTION: A high resolution interferometer using multi-pass optical configuration comprises a polarized beam splitter(10) and a multi-path forming device(30). The polarized beam splitter guides incident light to a measurement path in order to measure the displacement. The multi-path forming device performs re-reflection light to the polarized beam splitter after multiplying the optical path by using a corner cube array. The multi-path forming device comprises a moving corner cube array(31) and a fixed corner cube array(32). The moving corner cube array performs re-reflection of the incoming light while moving in a horizontal direction. The fixed corner cube array re-reflects the light reflected to the moving corner cube array to the moving corner cube array.

Abstract translation: 目的：提供使用多通光学配置的高分辨率干涉仪，通过简化光学系统的结构和增加光路来提高分辨率。 构成：使用多遍光学配置的高分辨率干涉仪包括偏振分束器（10）和多路径形成装置（30）。 偏振分束器将入射光引导到测量路径以测量位移。 多路形成装置在通过使用角立方体阵列对光路进行乘法后，对偏振分束器进行再反射光。 多路径形成装置包括移动角立方体阵列（31）和固定角立方体阵列（32）。 移动的角立方体阵列在水平方向移动时执行入射光的再反射。 固定角立方体阵列将反射到移动角立方体阵列的光重新反射到移动的角立方体阵列。