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公开(公告)号:KR102155569B1
公开(公告)日:2020-09-15
申请号:KR1020190075824
申请日:2019-06-25
Applicant: 한국표준과학연구원
Inventor: 윤주영 , 김진태 , 심섭 , 김하영 , 최은미
IPC: H01L51/00 , H01L51/56