公开(公告)号：KR1020090071055A

公开(公告)日：2009-07-01

申请号：KR1020070139250

申请日：2007-12-27

Applicant: 한국항공우주연구원

Inventor： 이보화 ,  이경재 ,  정재홍 ,  양수석

IPC: G01F1/68 ,  G01F23/00

CPC classification number: G01F1/684 ,  F05B2220/303 ,  G01D7/00 ,  G01D21/02 ,  G01K13/02

Abstract: A rake device and a manufacturing method thereof are provided to make the thickness of a rake thin by etching the flow path of actuating gas and to process design size and location accurately by etching an air flow path. A manufacturing method of a rake device comprises: a step(S1) providing an object; a step(S2) providing a mask in which a pattern is molded at one side of the object; a step forming a first rake by etching the side in which the mask is provided; a step(S5) repeating the steps and forming a second rake to form a flow path corresponding to the flow path of the first rake; and a step(S7) coupling the first rake and the second rake. In the first rake, the flow path of the object corresponding to the pattern is formed. The flow path of actuating gas is formed by the flow path of the first rake and the flow path of the second rake.

Abstract translation: 提供了一种耙式装置及其制造方法，其通过蚀刻致动气体的流动路径来使耙状物的厚度变薄，并且通过蚀刻空气流动路径来精确地处理设计尺寸和位置。 耙装置的制造方法包括：提供物体的步骤（S1） 提供其中在所述物体的一侧上模制图案的掩模的步骤（S2）; 通过蚀刻设置所述掩模的一侧形成第一耙子的步骤; 步骤（S5）重复所述步骤并形成第二耙子以形成与所述第一耙子的流路对应的流路; 以及将第一耙和第二耙相连接的步骤（S7）。 在第一耙子中，形成与图案对应的物体的流动路径。 致动气体的流路由第一耙的流路和第二耙的流路形成。