公开(公告)号：KR100665038B1

公开(公告)日：2007-01-04

申请号：KR1020050061325

申请日：2005-07-07

Applicant: 한양대학교 산학협력단

Inventor： 박인성 ,  이헌 ,  신수범 ,  문강훈 ,  안진호

IPC: H01L21/027 ,  B82Y40/00

CPC classification number: G03F7/0002 ,  B81C1/0046 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/887

Abstract: A structure of a stamp having an adhesion preventing layer, a manufacturing method thereof, and a nano pattern imprinting method using the same are provided to prevent an adhesion of a partial imprinting layer to a stamp by forming the adhesion preventing layer on a surface of the stamp. A nano-sized pattern is formed on a transparent substrate(11). An opaque metal layer(13) is formed corresponding to a partial surface of the transparent substrate. A first thin film layer(14) is formed on the surface of the opaque metal layer to reduce at least one of surface energy and friction coefficient. A second thin film layer(15) is formed on the first thin film layer to increase hydrophobicity. A buffer layer is formed between the opaque metal layer and the first thin film to increase adhesive strength.

Abstract translation: 提供具有防粘附层的印模的结构，其制造方法和使用其的纳米图案压印方法，以防止部分印刷层与印模的粘合， 邮票。 在透明基板（11）上形成纳米尺寸图案。 对应于透明基板的部分表面形成不透明金属层（13）。 在不透明金属层的表面上形成第一薄膜层（14）以减少表面能和摩擦系数中的至少一个。 在第一薄膜层上形成第二薄膜层（15）以增加疏水性。 在不透明金属层和第一薄膜之间形成缓冲层以提高粘合强度。