公开(公告)号：DE102007042943A1

公开(公告)日：2008-03-27

申请号：DE102007042943

申请日：2007-09-10

Applicant: ADEKA CORP

Inventor： WADA SENJI ,  ABE TETSUJI ,  SAKURAI ATSUSHI ,  HIGASHINO TAKASHI ,  FUJIMOTO RYUSAKU ,  SHIMIZU MASAKO

IPC: C07F7/00 ,  C07F5/00 ,  C23C16/40

Abstract: Titanium, zirconium and hafnium alkenoxides (I) are new. Metal alkenoxides of formula (I) are new. M(OR) 4 (I) R : 2-propen-1-yl, 1-methyl-2-propen-1-yl or 1,1-dimethyl-2-propen-1-yl. Independent claims are also included for: (1) material (M1) for forming a thin film, comprising a compound (I); (2) producing a thin film by vaporizing M1 over a substrate to form a (I)-containing vapor and forming a thin film on the substrate by decomposing (I) or subjecting (I) to a chemical reaction; (3) producing a thin film by vaporizing M1 over a substrate to form a (I)-containing vapor and forming a thin metal oxide film on the substrate by decomposing (I) or subjecting (I) to a chemical reaction in the presence of a reactive gas containing oxygen or ozone; (4) thin film produced as above.

公开(公告)号：EP1659130A4

公开(公告)日：2008-11-05

申请号：EP04771133

申请日：2004-08-02

Applicant: ADEKA CORP

Inventor： YOSHINAKA ATSUYA ,  SATO HIROKI ,  FUJIMOTO RYUSAKU

IPC: C01B13/20 ,  C07F17/00 ,  C01F17/00 ,  C07F5/00 ,  C23C16/18 ,  C23C16/42 ,  H01L21/316

CPC classification number: C23C16/18 ,  C07F17/00

Abstract: A rare earth metal complex which is a tris-s-butylcyclopentadienyl/rare earth metal complex represented by the following general formula (I). It is a liquid rare earth metal complex excellent in heat resistance and volatility and suitable for use as a material for thin-film formation. (In the formula, M represents a rare earth metal.)

公开(公告)号：JP2010037301A

公开(公告)日：2010-02-18

申请号：JP2008204272

申请日：2008-08-07

Applicant: Adeka Corp ,  株式会社Adeka

Inventor： FUJIMOTO RYUSAKU ,  SUZUKI SHINICHI

IPC: C07C209/84 ,  C07C211/08

Abstract: PROBLEM TO BE SOLVED: To provide a dehydration method of dialkylamine required to be decreased in metal impurities, and capable of sufficiently decreasing moisture content of the dialkylamine without performing distillation purification.
SOLUTION: A metal amide obtained from a metal and a dialkylamine is used as the dehydration agent, which metal is permissible to be contained based on use of the dialkylamine.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供需要降低金属杂质的二烷基胺的脱水方法，并且能够在不进行蒸馏纯化的情况下充分降低二烷基胺的含水量。 解决方案：使用由金属和二烷基胺获得的金属酰胺作为脱水剂，根据二烷基胺的用途，允许含有金属。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2011184343A

公开(公告)日：2011-09-22

申请号：JP2010050326

申请日：2010-03-08

Applicant: Adeka Corp ,  株式会社Adeka

Inventor： YAMADA KEIJI ,  FUJIMOTO RYUSAKU ,  MORISHIMA YUJI ,  ZUSHI TAKEHIRO ,  TANAKA SHINICHI

IPC: C07C309/04

Abstract: PROBLEM TO BE SOLVED: To provide a method for producing an organic copper (II) sulfonate having an impurity content reduced as low as possible.
SOLUTION: The method for producing an organic copper (II) sulfonate includes reacting copper with an organic sulfonic acid, water and oxygen. Consequently, the method for producing an organic copper (II) sulfonate in which impurities are efficiently reduced is made possible and an organic copper (II) sulfonate having impurity metals reduced to a ppb level desired as an electrolyte of electrolytic copper plating and further an organic copper (II) sulfonate in a form of an aqueous solution are produced.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 待解决的问题：提供一种制备杂质含量尽可能低的有机铜（Ⅱ）磺酸盐的方法。 解决方案：有机铜（II）磺酸盐的制备方法包括使铜与有机磺酸，水和氧反应。 因此，有效地还原杂质的有机硫酸铜（Ⅱ）的制造方法成为可能，并且将杂质金属的有机铜（Ⅱ）磺酸盐还原为ppb水平，作为电解镀铜的电解质，还有一种有机 制备水溶液形式的磺酸铜（II）。 版权所有（C）2011，JPO＆INPIT