公开(公告)号：DE4408523A1

公开(公告)日：1994-09-29

申请号：DE4408523

申请日：1994-03-14

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027 ,  H01J37/30 ,  G01N27/62

Abstract: A device with a charged beam has the following features: a vacuum chamber with a motion mechanism on the inside and a sample chamber (compartment). The sample chamber used is placed in an ultrahigh vacuum atmosphere or a gas atmosphere, a flat surface being formed on that surface of the motion mechanism which points towards the sample chamber and a flange having a flat open surface being arranged between the vacuum chamber and the sample chamber such that the open surface is opposite the flat surface, and is specifically formed with a small slot between the open surface and the flat surface to permit vacuum ventilation without any restrictions being placed on the motion mechanism, as a result of which the device operates without restricting the effect of the motion mechanism.

公开(公告)号：NL194745B

公开(公告)日：2002-09-02

申请号：NL9400393

申请日：1994-03-11

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.

公开(公告)号：DE4408523C2

公开(公告)日：2002-11-28

申请号：DE4408523

申请日：1994-03-14

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027

Abstract: A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.

公开(公告)号：NL194745C

公开(公告)日：2003-01-07

申请号：NL9400393

申请日：1994-03-11

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OKAYAMA SHIGEO ,  OGURA MUTSUO ,  KOMURO MASANORI ,  HIROSHIMA HIROSHI

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305 ,  H01L21/027