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公开(公告)号：JP2000258724A
公开(公告)日：2000-09-22
申请号：JP6238399
申请日：1999-03-09
Applicant: AGENCY IND SCIENCE TECHN
Inventor： ITO JUNJI , KANAMARU MASATAKE , MATSUKAWA TAKASHI , TAKAMATSU NORIYUKI
Abstract: PROBLEM TO BE SOLVED: To simplify a function of the part to be mounted on a human head, and also to drastically reduce a physical size and a weight by configuring this device with a transmission part and an image generating part separated from an image display part. SOLUTION: This image display device is configured with a transmitting part and an image generating part separated from an image display part, and only the display part of a very simple composition is mounted on a human head. Electronics parts such as for image generation, adjustment, and processing are attached to the wear, for example, a pocket and a belt, and an image obtained therefrom is transmitted to the display part on the above spectacles part to be displayed.
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公开(公告)号：JP2000155161A
公开(公告)日：2000-06-06
申请号：JP34486298
申请日：1998-11-19
Applicant: AGENCY IND SCIENCE TECHN , YASKAWA ELECTRIC CORP
Inventor： ITO JUNJI , KAMIMURA KOJI
Abstract: PROBLEM TO BE SOLVED: To provide a magnetic sensor capable of a wide range of magnetic field measurements by forming a circular electron beam which reaches an anode and suppressing saturation phenomena. SOLUTION: A field emission-type emitter electrode 1 to emit electrons, a gate electrode 2 to control an emitter current which is the number of electrons to be emitted from the emitter electrode 1, and an anode 3 to collect electrons emitted from the emitter electrode 1, are arranged in a vacuum container 8. While traveling in the vacuum and being incident onto the anode 3, electrons emitted from the emitter electrode 1 are deflected by an external magnetic field to change the number of electrons incident onto the anode 3. On the basis of this, the external magnetic field is detected. In this case, a deflecting electrode 4 for deflecting an electron beam which reaches the anode 3 into a circular shape is provided to maintain the circular shape of the electron beam, to suppress saturation phenomena, and to enable highly accurate measurements.
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公开(公告)号：JPH11218569A
公开(公告)日：1999-08-10
申请号：JP2131898
申请日：1998-02-02
Applicant: AGENCY IND SCIENCE TECHN , YASKAWA ELECTRIC CORP
Inventor： ITO JUNJI , KAMIMURA KOJI
Abstract: PROBLEM TO BE SOLVED: To provide a magnetic sensor with high reliability and a wide application range. SOLUTION: In the magnetic sensor provided with an electric field emission type emitter electrode 1 arranged to emit a linear electron beam into a package evacuated inside, a gate electrode 2 controlling the number of electrons emitted from the emitter electrode 1, anode electrodes 31 and 32 provided deridedly at least in two via an insulator layers 61 and 62 on the substrate 9 and collecting electrons of the electron beam and a bias electrode 4 biasing the electron beam and detecting the intensity of the external magnetic field base on the variation of electron number coming in the anode electrodes due to the external magnetic field of the measuring object, the insulation layers between the separated anode electrodes 31 and 32 are removed. By this, the distribution of current is exactly measured and the accuracy is improved.
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公开(公告)号：JPH10312737A
公开(公告)日：1998-11-24
申请号：JP21616097
申请日：1997-08-11
Applicant: FUTABA DENSHI KOGYO KK , AGENCY IND SCIENCE TECHN
Inventor： ITO SHIGEO , NIIYAMA TAKEHIRO , TOMITA MASAHARU , KAGAWA NORITAKA , INOUE AKIRA , ITO JUNJI , KANAMARU MASATAKE
Abstract: PROBLEM TO BE SOLVED: To make the electron emission quantities of respective emitters uniform and prevent line defect even if a gate electrode and an emitter are short circuited. SOLUTION: The degree of electron movement of a channel formed on a channel forming electrode 5 is controlled by applying positive voltage to an electric current control electrode 3. Consequently, the quantity of electric current supplied to an emitter 9 from the cathode 4 can be controlled. Moreover, when the emitter 9 and a gate electrode 7 are short-circuited, the electric current density of the channel is increased and the channel is broken, so that the electric current supply to the emitter 9 can be stopped.
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公开(公告)号：JPH10125218A
公开(公告)日：1998-05-15
申请号：JP7579697
申请日：1997-03-27
Applicant: TOPPAN PRINTING CO LTD , AGENCY IND SCIENCE TECHN
Inventor： GAMO SHUSUKE , KANAMARU MASATAKE , ITO JUNJI
Abstract: PROBLEM TO BE SOLVED: To provide a cold electron emission element to suppress a local large current without increasing the operating voltage, to minimize current variations by controlling each element, and to adopt a glass substrate whose area can be easily extended at a low cost. SOLUTION: An emitter wiring layer 2, an insulation layer 4 and a gate electrode 5 are laminated on an insulative substrate 1 in that order. An opening part A extending toward the emitter wiring layer 2 is provided in both the gate electrode 5 and the insulation layer 4. An emitter 3 is formed on the emitter wiring layer 2 within the opening part A so as not to come into contact with the gate electrode 5. In this case, the emitter 3 is constructed of a p-type semiconductor or a layered product of a n-type and p-type semiconductor.
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Patent Agency Ranking
公开(公告)号：JPH1062347A
公开(公告)日：1998-03-06
申请号：JP21620796
申请日：1996-08-16
Applicant: AGENCY IND SCIENCE TECHN
Inventor： TANI TOSHIAKI , KOMURO MASANORI , ITO JUNJI , MAACHIN BATSUHA
Abstract: PROBLEM TO BE SOLVED: To provide an extremely small-sized single molecular fine optical device which is easily and stably operable with hardly having a regulating part, and enhance the converging efficiency o/f signal light to realize the accumulation of necessary functions basically with one optical element. SOLUTION: An excited light is emitted to a sample through a cover glass 4, and the signal light from the sample is taken as parallel beams through a rod type lens 1 and sent to a light detector. Tungsten is evaporated on one end surface of the rod type lens 1 (pitch 0,.25) as a thin film 2 of 0.5μm thick, an aperture about 4μm in diameter is formed in the center of the thin film by use of focused ion beam method using divalent gold ion, the cover glass 4 of 0.15μmm thick is put on the aperture to form a sample space 3, and the sample is put in the sample space 3, whereby a single molecular spectrometric device is constituted. When a single mode pigment laser in the wavelength range of 570nm is used as an excitation light source, and the wavelength is scanned to measure the excited spectrum, a single spectrum is provided.
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公开(公告)号：JPH09259746A
公开(公告)日：1997-10-03
申请号：JP6879596
申请日：1996-03-25
Applicant: AGENCY IND SCIENCE TECHN , KOBE STEEL LTD
Inventor： ITO JUNJI , KANAMARU MASATAKE , HIRANO TAKAYUKI
Abstract: PROBLEM TO BE SOLVED: To provide a cold electron emitting element in which a required area per element is small, accumulation degree can be heightened, a manufacturing process is simple, and a yield is high. SOLUTION: On the surface of a p-type semiconductor substrate 31 n-type semiconductor regions 32, 33 are formed, and the n-type semiconductor region 32 is formed into an emitter region 38 having a sharp end. On the substrate 31 an insulating layer 34 is formed, and the emitter region is arranged in the opening portion 35 thereof. On the insulating layer 34 an extracting electrode 39 surrounding the emitter region is formed, on the n-type semiconductor region 33 a source electrode 37 is formed, on the insulating layer a control electrode 40 is formed, and positive voltages are applied to the extracting electrode and the control electrode. Electrons are emitted from the sharp end of the emitter region, an n-type inversion layer is formed on the surface of the p-type semiconductor substrate, and a channel is formed so as to connect both n-type semiconductor regions so that a channel current can be controlled independent of an extracting voltage (an electron emission current).
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公开(公告)号：JPH09197031A
公开(公告)日：1997-07-31
申请号：JP842896
申请日：1996-01-22
Applicant: AGENCY IND SCIENCE TECHN , YASKAWA ELECTRIC CORP
Inventor： ITO JUNJI , KAMIMURA KOJI
Abstract: PROBLEM TO BE SOLVED: To obtain a three-dimensional magnetic field information by facilitating the measurement of the amplitude of magnetic field by forming electrons incident on an anode electrode in a cross shape, and dividing the electrode into four segments. SOLUTION: An electron beam emitted from a field emission type emitter electrode 1 becomes a cross shape by deflecting electrodes 4a to 4d divided into four segments, then currents by the beam arriving at anode electrodes 3 divided into four segments are measured, and the arrival position of the beam is detected. When no external magnetic field is applied, the electrons emitted from the electrode 1 are diverged since not vertical components are on a board 5. At this time, the electrons emitted from the electrode 1 are deflected by the electrodes 4a to 4d, and arrive as cross shape at the electrodes 3 vertically above the grooves XX' and BY' of the electrodes 4a to 4d at the intersection P of the grooves XX' and BY' of the electrodes 4a to 4d, i.e., the intersection P' of a vertical line extended from the position of the electrode 1 to the electrode 3 as the center.
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公开(公告)号：JPH07249368A
公开(公告)日：1995-09-26
申请号：JP6436094
申请日：1994-03-09
Applicant: FUTABA DENSHI KOGYO KK , AGENCY IND SCIENCE TECHN
Inventor： ITO SHIGEO , WATANABE TERUO , OCHIAI HISATAKA , ITO JUNJI , KANAMARU MASATAKE
Abstract: PURPOSE:To stabilize emission current ay providing a silicon substrate with a root emitter and a control electrode corresponding to the emitter, and causing field emission corresponding to a voltage applied to the control electrode. CONSTITUTION:An Si substrate 10 is put in an oxidation furnace to form a thermally oxidized film which is patterned into stripes. RIE etching is performed to machine the substrate 10 into a wedge shape, and the substrate is put in a thermal oxidation furnace to form a thermally oxidized film. SiO2 and Nb, which form an insulating layer 12 and a control electrode 13, respectively, are vapor deposited over the upper surface of the thermally oxidized film, and Al and Mo are further vapor deposited as protective films. Those layers which serve as emitter masks are removed by BHF etching to expose stripes of emitter projections each of approximately triangular cross section. These stripes are patterned so that the width W and pitch P of a roof emitter 11 take a PAW value of about 2 to 5. After etching, the Al and Mo layers are removed to form a plurality of emitters 11 parted like combteeth.
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公开(公告)号：JPH07192682A
公开(公告)日：1995-07-28
申请号：JP35423693
申请日：1993-12-27
Applicant: AGENCY IND SCIENCE TECHN
Inventor： SHIMIZU KEIZO , ITO JUNJI , KANAMARU MASATAKE
IPC: G03F7/20 , H01J37/073 , H01J37/305 , H01L21/027
Abstract: PURPOSE:To efficiently form a fine complicated pattern by improving decreasing a processing speed due to fining the pattern. CONSTITUTION:A plurality of fine electron guns 20, using a field emission type emitter 9, are integrated to be formed on the same substrate 1. Emitting an electron beam 12 is limited to the individual fine electron gun 20 or to each block thereof, to divide a linear pattern 30 formed in parallel on a sample surface.
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