公开(公告)号：WO2015067433A1

公开(公告)日：2015-05-14

申请号：PCT/EP2014/071814

申请日：2014-10-10

Applicant: ASML NETHERLANDS B.V.

Inventor： WUISTER, Sander, Frederik ,  AMBESI, Davide

IPC: G03F7/00

CPC classification number: G03F1/70 ,  G03F7/0002 ,  G06F17/5068 ,  G06F2217/12

Abstract: A method of designing a feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout for lithography, the feature guiding template including at least two portions joined by a bottleneck, the method including determining a characteristic of the feature guiding template based on at least a function of geometry of the feature guiding template comprising a value of a first width of at least one of the portions, a value of a second width of the bottleneck, or a value based on both the first width and the second width.

Abstract translation: 一种设计特征引导模板的方法，用于引导嵌段共聚物的自组装以在用于光刻的设计布局中形成至少两个特征，所述特征引导模板包括由瓶颈连接的至少两个部分，所述方法包括确定 所述特征引导模板至少基于所述特征引导模板的几何形状的函数，所述特征指导模板包括所述部分中的至少一个部分的第一宽度的值，所述瓶颈的第二宽度的值或基于所述第一 宽度和第二宽度。

公开(公告)号：WO2015018590A1

公开(公告)日：2015-02-12

申请号：PCT/EP2014/064728

申请日：2014-07-09

Applicant: ASML NETHERLANDS B.V.

Inventor： WUISTER, Sander ,  AMBESI, Davide ,  LAENENS, Bart

IPC: B81C1/00 ,  G03F7/00

CPC classification number: G03F1/70 ,  B81C1/00031 ,  B81C2201/0149 ,  G03F7/0002 ,  G06F17/5072 ,  G06F17/5081

Abstract: A method of design or verification for a self-assemblable block copolymer feature, the block copolymer feature including a first domain having a first polymer type and a second domain having a second polymer type, the method including, based on the length of the second polymer type or on an uncertainty in position of the first domain within the block copolymer feature calculated based on the length of the second polymer type, adjusting a parameter of the self-assembly process of a block copolymer feature or verifying a placement of a block copolymer feature.

Abstract translation: 一种用于可自组装嵌段共聚物特征的设计或验证方法，所述嵌段共聚物特征包括具有第一聚合物类型的第一结构域和具有第二聚合物类型的第二结构域，所述方法包括基于所述第二聚合物的长度 类型或基于第二聚合物类型的长度计算的嵌段共聚物特征中的第一结构域的不确定性，调节嵌段共聚物特征的自组装过程的参数或验证嵌段共聚物特征的放置 。

公开(公告)号：WO2014191163A1

公开(公告)日：2014-12-04

申请号：PCT/EP2014/059097

申请日：2014-05-05

Applicant: ASML NETHERLANDS B.V.

Inventor： WUISTER, Sander ,  DRUZHININA, Tamara ,  VAN MALE, Jan ,  KLEIN-WOLTERINK, Joanne ,  AMBESI, Davide

IPC: G03F7/00

CPC classification number: G06F17/5009 ,  G03F7/0002 ,  G06F17/5081 ,  G06F2217/12

Abstract: A method of determining an uncertainty in the position of a domain within a self- assembly block copolymer (BCP) feature. The method includes simulating a BCP feature, calculating a minimum energy position of a first domain within the simulated BCP feature, simulating the application of a potential that causes the position of the first domain to be displaced from the minimum energy position, simulating release of the potential back toward the minimum energy, recording a plurality of energies of the BCP feature during the release and recording at each of the plurality of energies a displacement of the first domain from the minimum energy position, calculating, from the recorded energies and recorded displacements, a probability distribution indicating a probability of the first domain being displaced from the minimum energy position, and, from the probability distribution, calculating an uncertainty in the position of the first domain within the BCP feature.

Abstract translation: 确定自组装嵌段共聚物（BCP）特征中的域的位置的不确定性的方法。 该方法包括模拟BCP特征，计算模拟BCP特征中的第一域的最小能量位置，模拟使第一域的位置从最小能量位置移位的电位的应用，模拟BCP特征的释放 在释放期间记录多个能量的BCP特征，并且在多个能量中的每一个处记录第一域从最小能量位置的位移，从记录的能量和记录的位移计算出， 指示第一域从最小能量位置移位的概率的概率分布，并且从概率分布计算BCP特征中的第一域的位置的不确定性。