公开(公告)号：WO2014001071A3

公开(公告)日：2014-01-03

申请号：PCT/EP2013/061941

申请日：2013-06-11

Applicant: ASML NETHERLANDS B.V.

Inventor： KLEEMANS, Niek ,  VAN ASTEN, Nicolaas ,  KOLESNYCHENKO, Aleksey ,  VAN AERLE, Nick ,  BAAS, Gerardus ,  EURLINGS, Markus ,  BEIJSENS, Rolf

IPC: G03F7/20 ,  G01J1/02 ,  G01J1/42 ,  G01J5/10 ,  G02B5/18 ,  G02B27/44

Abstract: A collector module (SO) is disclosed comprising: a collector (14) for collecting radiation generated by a radiation generating plasma (10), and for directing at least a portion of the generated radiation to a focal point (16); a structure (30) upstream of the focal point and extending at least partially around an expected position of a beam comprising the at least a portion of the collected radiation (B); a diffractive element being arranged to diffract infrared radiation that is reflected from the plasma formation location. When the plasma formation location is at an intended location, m = +1 diffracted infrared radiation (32) is directed towards a first region of the structure. At m = -1 diffracted infrared radiation is directed towards a second region of the structure. Also disclosed is an infra-red detector with increased dynamic range obtained by providing a screen for forming an image of a hotspot and a camera directed on to the screen. The dynamic range of the detector is improved either by heating the screen such that a low intensity hotspot is raised above a camera threshold, or by dividing the image into multiple images of differing intensities.