公开(公告)号：WO2014001071A3

公开(公告)日：2014-01-03

申请号：PCT/EP2013/061941

申请日：2013-06-11

Applicant: ASML NETHERLANDS B.V.

Inventor： KLEEMANS, Niek ,  VAN ASTEN, Nicolaas ,  KOLESNYCHENKO, Aleksey ,  VAN AERLE, Nick ,  BAAS, Gerardus ,  EURLINGS, Markus ,  BEIJSENS, Rolf

IPC: G03F7/20 ,  G01J1/02 ,  G01J1/42 ,  G01J5/10 ,  G02B5/18 ,  G02B27/44

Abstract: A collector module (SO) is disclosed comprising: a collector (14) for collecting radiation generated by a radiation generating plasma (10), and for directing at least a portion of the generated radiation to a focal point (16); a structure (30) upstream of the focal point and extending at least partially around an expected position of a beam comprising the at least a portion of the collected radiation (B); a diffractive element being arranged to diffract infrared radiation that is reflected from the plasma formation location. When the plasma formation location is at an intended location, m = +1 diffracted infrared radiation (32) is directed towards a first region of the structure. At m = -1 diffracted infrared radiation is directed towards a second region of the structure. Also disclosed is an infra-red detector with increased dynamic range obtained by providing a screen for forming an image of a hotspot and a camera directed on to the screen. The dynamic range of the detector is improved either by heating the screen such that a low intensity hotspot is raised above a camera threshold, or by dividing the image into multiple images of differing intensities.

公开(公告)号：WO2014161698A1

公开(公告)日：2014-10-09

申请号：PCT/EP2014/054221

申请日：2014-03-05

Applicant: ASML NETHERLANDS B.V.

Inventor： KLEEMANS, Niek ,  GLUSHKOV, Denis ,  HULTERMANS, Ronald ,  RENKENS, Benedictus ,  SWINKELS, Gerardus ,  VERSPEEK, Christiaan

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A source collector apparatus for use in a lithographic apparatus comprises a fuel droplet generator (4) configured in use to generate a stream of fuel droplets (6) directed from an outlet of the fuel droplet generator towards a plasma formation location (7). In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (A) (eg hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, detection apparatus may be provided as part of a shroud (5) to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.

Abstract translation: 用于光刻设备的源极收集器装置包括燃料液滴发生器（4），其被配置用于产生从燃料液滴发生器的出口朝向等离子体形成位置（7）引导的燃料液滴流（6）。 为了防止液滴卫星干扰等离子体形成，提供气体供应，其在使用中提供将任何液滴卫星偏离燃料液滴流的气体（A）（例如氢气）流。 另外，检测装置可以被提供作为护罩（5）的一部分，以确定出现燃料液滴聚结的点，从而提供卫星液滴存在于燃料液滴流中的可能性的指示。