公开(公告)号：WO2014020003A1

公开(公告)日：2014-02-06

申请号：PCT/EP2013/065947

申请日：2013-07-30

Applicant: ASML NETHERLANDS B.V.

Inventor： BANINE, Vadim ,  MINNAERT, Arthur ,  MUITJENS, Marcel ,  YAKUNIN, Andrei ,  SCACCABAROZZI, Luigi ,  MALLMANN, Hans ,  BAL, Kursat ,  LUIJTEN, Carlo ,  NIENHUYS, Han-Kwang ,  HUIJBERTS, Alexander ,  GASSELING, Paulus ,  RIZO DIAGO, Pedro ,  VAN KAMPEN, Maarten ,  VAN AERLE, Nick

IPC: G03F7/20 ,  C01B31/04 ,  G21K1/06

CPC classification number: G03F7/70191 ,  G03F7/70308 ,  G03F7/70575 ,  G21K1/10

Abstract: There is disclosed a lithographic apparatus provided with a spectral purity filter which is provided in the projection system (PSW) and adjacent the substrate table (WT). The spectral purity filter is preferably a membrane (14) formed of polysilicon, a multilayer material, a carbon nanotube material or graphene. The membrane may be provided with a protective capping layer, and/or a thin metal transparent layer.

Abstract translation: 公开了一种设置有光谱纯度滤光片的光刻设备，其设置在投影系统（PSW）中并且邻近衬底台（WT）。 光谱纯度滤光片优选为由多晶硅，多层材料，碳纳米管材料或石墨烯形成的膜（14）。 膜可以设置有保护性盖层和/或薄金属透明层。

公开(公告)号：WO2014001071A3

公开(公告)日：2014-01-03

申请号：PCT/EP2013/061941

申请日：2013-06-11

Applicant: ASML NETHERLANDS B.V.

Inventor： KLEEMANS, Niek ,  VAN ASTEN, Nicolaas ,  KOLESNYCHENKO, Aleksey ,  VAN AERLE, Nick ,  BAAS, Gerardus ,  EURLINGS, Markus ,  BEIJSENS, Rolf

IPC: G03F7/20 ,  G01J1/02 ,  G01J1/42 ,  G01J5/10 ,  G02B5/18 ,  G02B27/44

Abstract: A collector module (SO) is disclosed comprising: a collector (14) for collecting radiation generated by a radiation generating plasma (10), and for directing at least a portion of the generated radiation to a focal point (16); a structure (30) upstream of the focal point and extending at least partially around an expected position of a beam comprising the at least a portion of the collected radiation (B); a diffractive element being arranged to diffract infrared radiation that is reflected from the plasma formation location. When the plasma formation location is at an intended location, m = +1 diffracted infrared radiation (32) is directed towards a first region of the structure. At m = -1 diffracted infrared radiation is directed towards a second region of the structure. Also disclosed is an infra-red detector with increased dynamic range obtained by providing a screen for forming an image of a hotspot and a camera directed on to the screen. The dynamic range of the detector is improved either by heating the screen such that a low intensity hotspot is raised above a camera threshold, or by dividing the image into multiple images of differing intensities.