公开(公告)号：WO2019134776A1

公开(公告)日：2019-07-11

申请号：PCT/EP2018/082983

申请日：2018-11-29

Applicant: ASML NETHERLANDS B.V.

Inventor： SIMONS, Wilhelmus, Franciscus, Johannes ,  BRAAKSMA, Dave ,  BUTLER, Hans ,  COX, Hendrikus, Herman, Marie ,  LEENAARS, Rene Wilhelmus Antonius Hubertus ,  LIBOUREL, Stephan, Christiaan, Quintus ,  VAN DUIJNHOVEN, Martinus ,  WIJCKMANS, Maurice, Willem, Jozef, Etiënne

IPC: G03F7/20 ,  H01L21/68

CPC classification number: G03F7/70766 ,  G03F7/70725 ,  G03F7/70758 ,  G03F7/709 ,  H01L21/682

Abstract: The present invention relates to a positioning system, comprising: a first actuator to exert an actuation force on a moveable body, the first actuator being coupled to a balance mass configured to absorb a reaction force resulting from the actuation force, the actuation force providing an acceleration of the moveable body and the reaction force providing an acceleration of the balance mass, wherein a force resulting from the acceleration of the moveable body together with a force resulting from the acceleration of the balance mass result in a balance mass torque; a balance mass support to support the balance mass onto a frame, which balance mass support engages the frame at a support position; and a torque compensator; wherein the torque compensator exerts a compensation force to compensate the balance mass torque, and wherein the torque compensator exerts the compensation force on the frame at the support position.

公开(公告)号：WO2017137181A1

公开(公告)日：2017-08-17

申请号：PCT/EP2017/050199

申请日：2017-01-05

Applicant: ASML NETHERLANDS B.V.

Inventor： KIMMAN, Maarten, Hartger ,  BRAAKSMA, Dave ,  HEIJMANS, Peter, Michel, Silvester, Maria ,  HOOGENDAM, Christiaan, Alexander

IPC: H02K41/03 ,  H02K3/28 ,  H02K29/03 ,  H02K7/09

CPC classification number: H02K41/031 ,  H02K3/28 ,  H02K7/09 ,  H02K29/03 ,  H02K2201/18 ,  H02K2213/03

Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.

Abstract translation: 描述了一种电磁电动机，所述电磁电动机包括：磁体组件，所述磁体组件被配置为产生具有沿第一方向的节距Pm1和沿第二方向的节距Pm2的二维交变磁场; 线圈组件，所述线圈组件被配置为与所述磁体组件协作以在所述第一方向上产生第一力并且在所述第二方向上产生第二力，其中所述线圈组件包括第一线圈组，所述第一线圈组包括用于产生所述第一力的多个第一线圈 以及第二线圈组，其包括用于产生第二力的多个第二线圈，其中第一方向上的第一线圈组中的线圈节距Pc1与第一方向上的线圈节距Pc1之比R1与第一方向上的线圈节距Pc2之比R1 第二个线圈设置在第二个方向上超过Pm2。