公开(公告)号：WO2021083608A1

公开(公告)日：2021-05-06

申请号：PCT/EP2020/077611

申请日：2020-10-01

Applicant: ASML NETHERLANDS B.V.

Inventor： ZHANG, Qiang ,  GUO, Yunbo ,  CAO, Yu ,  WANG, Jen-Shiang ,  LU, Yen-Wen ,  CHEN, Danwu ,  YANG, Pengcheng ,  LIANG, Haoyi ,  CHEN, Zhichao ,  PU, Lingling

IPC: G03F7/20

Abstract: A method for training a machine learning model to generate a predicted measured image includes obtaining (a) an input target image associated with a reference design pattern, and (b) a reference measured image associated with a specified design pattern printed on a substrate, wherein the input target image and the reference measured image are non-aligned images; and training, by a hardware computer system and using the input target image, the machine learning model to generate a predicted measured image.